File:PECVD1 SiN Stress vs. N2 plot.jpg: Difference between revisions

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Latest revision as of 19:08, 2 June 2023

Example of Si3N4 modified stress via. varying N2 flow. Refractive index is relatively constant (one outlier), and stress varies continuously from tensile to compressive. Demis D. John 2011, Blumenthal Group.

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current19:08, 2 June 2023Thumbnail for version as of 19:08, 2 June 2023843 × 576 (85 KB)John d (talk | contribs)better formatting, colors axes mathcing markers etc
18:52, 2 June 2023Thumbnail for version as of 18:52, 2 June 2023842 × 572 (73 KB)John d (talk | contribs)

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