Template:Announcements: Difference between revisions
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=====Unaxis ICP-PECVD is DOWN===== |
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=====Christmas Lab Shutdown: Dec 22-25===== |
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I removed the wafer that was stuck in the process chamber. Once again it was user error. You MUST remove ALL of the resist from the outer 5-7mm of your wafer when processing with 100mm substrates. |
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Users, |
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Sadly the system is still down. I looked into the RF1 tuning issues and it looks as though it has failed completely. I tried replacing the AMT controller but the failure mode didn't change. I did notice that when I placed the AMT controller in Manual and tried to drive the caps the matching network was unresponsive. It looks like the matching network may need to be replaced.-Tony |
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To perform annual maintenance, we are planning to have the lab shut down from '''''9 am on Monday December 22 through 9 am Friday December 26th'''''. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:25, 30 May 2023 (PDT) |
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=====Plasma Activation (EVG 810)===== |
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Please plan accordingly. |
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We have received almost all the replacement parts for the tool except the new chuck. The original delivery date of mid June has now been pushed out to early September and they have stated that this is the best that their supplier can do. I will not be installing any new parts on the tool until we have everything. |
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- Peder Lenvik |
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Runs will still require Staff supervision until then. |
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//[[User: |
// [[User:John_d|Demis D. John]] 02:03, 27 November 2025 (UTC) |
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=====Announcements moved===== |
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Please check the announcements in SignupMonkey for equipment notifications. |
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// [[User:John_d|Demis D. John]] 02:03, 27 November 2025 (UTC) |
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Latest revision as of 06:39, 3 December 2025
Christmas Lab Shutdown: Dec 22-25
Users, To perform annual maintenance, we are planning to have the lab shut down from 9 am on Monday December 22 through 9 am Friday December 26th.
Please plan accordingly. - Peder Lenvik // Demis D. John 02:03, 27 November 2025 (UTC)
Announcements moved
Please check the announcements in SignupMonkey for equipment notifications. // Demis D. John 02:03, 27 November 2025 (UTC)