Template:Announcements: Difference between revisions
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=====EBL Move-In: Tues 9-11a===== |
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Users, |
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I removed the wafer that was stuck in the process chamber. Once again it was user error. You MUST remove ALL of the resist from the outer 5-7mm of your wafer when processing with 100mm substrates. |
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Sadly the system is still down. I looked into the RF1 tuning issues and it looks as though it has failed completely. I tried replacing the AMT controller but the failure mode didn't change. I did notice that when I placed the AMT controller in Manual and tried to drive the caps the matching network was unresponsive. It looks like the matching network may need to be replaced.-Tony |
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Thank you for your patience while we moved the new EBL system in. |
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=====Plasma Activation (EVG 810)===== |
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The lab is fully open for use. |
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We have received almost all the replacement parts for the tool except the new chuck. The original delivery date of mid June has now been pushed out to early September and they have stated that this is the best that their supplier can do. I will not be installing any new parts on the tool until we have everything. |
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Runs will still require Staff supervision until then. |
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Peder Lenvik |
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Sr. Facilities Lead |
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// [[User:John_d|Demis D. John]] 23:47, 10 March 2025 (UTC) |
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=====MLA150 is UP===== |
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System will be available at 12:30 today (Fri Mar 7th). No changes to OAF settings but PAF has moved about 10 points positive for focus. We will work on adjusting PAF back to around 0 (on our cal resist) some time next week. |
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-Lee |
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//[[User:John_d|Demis D. John]] 20:51, 7 March 2025 (UTC) |
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=====Stepper #3 (ASML DUV) - Maint Complete ===== |
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ASML Maintenance is complete, the system is up. |
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// [[User:John_d|Demis D. John]] 02:18, 7 March 2025 (UTC) |
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=====RIE #5 Down: Mon March 13th ===== |
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RIE #5 will be down Monday March 13th through the end of Wednesday March 15th for maintenance. |
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If we complete the job early we will send a follow-up email releasing the system. |
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=====New Gowns: Toolbelts purchases===== |
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We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase. |
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Two vendors for cleanroom belts we are using are listed here, you may request others: |
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* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist. |
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* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack] |
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// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC) |
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=====Suss SB6-8E===== |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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I will send out an update once we have one. |
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-Aidan |
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// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC) |
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=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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Latest revision as of 19:15, 11 March 2025
EBL Move-In: Tues 9-11a
Users,
Thank you for your patience while we moved the new EBL system in.
The lab is fully open for use.
Peder Lenvik
Sr. Facilities Lead // Demis D. John 23:47, 10 March 2025 (UTC)
MLA150 is UP
System will be available at 12:30 today (Fri Mar 7th). No changes to OAF settings but PAF has moved about 10 points positive for focus. We will work on adjusting PAF back to around 0 (on our cal resist) some time next week. -Lee //Demis D. John 20:51, 7 March 2025 (UTC)
Stepper #3 (ASML DUV) - Maint Complete
ASML Maintenance is complete, the system is up. // Demis D. John 02:18, 7 March 2025 (UTC)
RIE #5 Down: Mon March 13th
RIE #5 will be down Monday March 13th through the end of Wednesday March 15th for maintenance.
If we complete the job early we will send a follow-up email releasing the system.
//Vraj Mehalana 09:46, 21 February 2025 (UTC)
New Gowns: Toolbelts purchases
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
Two vendors for cleanroom belts we are using are listed here, you may request others:
- Uniform Technology Tool Belt - note the waist size, the 49” belt fits up to ~36-38” waist.
- HiTEC Fannypack
// Demis D. John 03:34, 3 January 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)