Template:Announcements: Difference between revisions

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(updated DUV flood is UP, deleted old lab shutdown and PECVD maint messages)
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=====DUV Flood: UP with new procedure=====
=====Lab is OPEN=====
The new parts have been installed and the tool has been tested.
We completed our work early and the lab is now open for use.
-- Tony


⚫
//[[User:John_d|Demis D. John]] 22:23, 10 February 2025 (UTC)
We have added a timer that interlocks the lamp power supply since some users seem to have a problem remembering to turn the tool off when finished with it. The minimum time it can be set for is 30 minutes and the max is 3 hours. You will no longer be operating the main breaker on the front of the power supply. I have updated the SOP to reflect the changes, there is a copy at the tool and on its Wiki page:


=====Olympus DSX Microscope: Down=====
[[https://wiki.nanofab.ucsb.edu/w/images/8/89/DUV_Flood_Expose_SOP_Rev_C.pdf DUV_Flood_Expose_SOP_Rev_C.pdf]]
After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more.
⚫
// [[User:John_d Demis D. John]] 16:41, 4 January 2024 (PST)
-- Tony Bosch
// [[User:John_d|Demis D. John]] 20:41, 5 February 2025 (UTC)


=====Stepper #1 (GCA 6300) - Scheduled Maintenance=====
=====Stepper #3 (ASML DUV) - Maint moved to March 3rd=====
We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd.
The tool will be undergoing maintenance and be unavailable the following dates and times:
⚫
Please plan your work accordingly.
// [[User:John_d|Demis D. John]] 19:44, 4 February 2025 (UTC)


=====ICP #2 Maint: Complete=====
1-18-24 at 8:00am to 1-18-24 at 6:00pm


The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer
⚫
Please plan your processing activities accordingly.


//[[User:John_d|Demis D. John]] 02:01, 5 February 2025 (UTC)
⚫
Bill Millerski


=====Oxford ALD+Ion Mill: UP=====
⚫
//[[User:Mehalana v|Vraj Mehalana]] 21:49, 21 December 2023 (PST)
The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.


Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.
===== Stepper #2 (GCA Autostep 200) - Scheduled Maintenance=====
The tool will be undergoing maintenance and be unavailable the following dates and times:


Please use the original tool name on SUM to make all future tool reservations.
1-15-24 at 8:00am to 1-17-24 at 6:00pm


There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.
Please plan your processing activities accordingly.

Please feel free to email me directly with any questions you may have.

Thanks
⚫
Bill Millerski
UCSB
//[[User:John_d|Demis D. John]] 19:48, 4 February 2025 (UTC)


=====New Gowns: Toolbelts purchases=====
//[[User:Mehalana v|Vraj Mehalana]] 21:49, 21 December 2023 (PST)
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.


Two vendors for cleanroom belts we are using are listed here, you may request others:
=====Job Opening: Process Engineer=====
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details.
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]


//[[User:Mehalana v|Vraj Mehalana]] 14:52, 30 October 2023 (PDT)
// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)


=====Lab Access Changes: Symmetry App=====
=====Suss SB6-8E=====
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''.


I will send out an update once we have one.
// [[User:John d|John d]] 13:49, 7 November 2023 (PST)
-Aidan
⚫
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)


=====Wafer Bonder, (Suss SB6-8E)=====
=====ICP1 Down=====
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
SUSS now aims to be on site in early February. I’ll will send out an email once I get confirmation for a specific date.
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST)
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)


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Latest revision as of 22:23, 10 February 2025

Lab is OPEN

We completed our work early and the lab is now open for use. -- Tony

//Demis D. John 22:23, 10 February 2025 (UTC)

Olympus DSX Microscope: Down

After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more. -- Tony Bosch // Demis D. John 20:41, 5 February 2025 (UTC)

Stepper #3 (ASML DUV) - Maint moved to March 3rd

We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd. Please plan your work accordingly. // Demis D. John 19:44, 4 February 2025 (UTC)

ICP #2 Maint: Complete

The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer

//Demis D. John 02:01, 5 February 2025 (UTC)

Oxford ALD+Ion Mill: UP

The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.

Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.

Please use the original tool name on SUM to make all future tool reservations.

There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.

Please feel free to email me directly with any questions you may have.

Thanks Bill Millerski UCSB //Demis D. John 19:48, 4 February 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

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