Difference between revisions of "Template:Announcements"
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| + | =====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
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| + | Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
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| − | Beginning Tuesday January 23rd, we will be pulling gowns and booties for refresh. Please remove all personal items from your suits prior to the week your section will be cleared. |
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| − | =====EBeam#1: Down===== |
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| − | EBeam1 will remain down until further notice. I found what may be the root cause of the PLC issues, which is the close/pump momentary button was bad and causing a constant signal to the PLC controller. |
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| − | // [[User:John_d|Demis D. John]] 07:49, 11 January 2024 (PST) |
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| − | ===== |
+ | =====MA6 TSA is down - Update===== |
| + | We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool. |
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| − | We ran 400 wafers successfully, and focus and alignment is in-spec. System is up. |
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| − | // [[User:John_d|Demis D. John]] 07:28, 11 January 2024 (PST) |
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| + | The tool remains up for backside alignment and topside exposures that do not require alignment. |
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| − | =====DUV Flood: UP with new procedure===== |
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| − | The new parts have been installed and the tool has been tested. |
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| + | -Lee |
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| − | We have added a timer that interlocks the lamp power supply since some users seem to have a problem remembering to turn the tool off when finished with it. The minimum time it can be set for is 30 minutes and the max is 4 hours. You will no longer be operating the main breaker on the front of the power supply. I have updated the SOP to reflect the changes, there is a copy at the tool and on [https://wiki.nanofab.ucsb.edu/wiki/DUV_Flood_Expose#Documentation:~:text=Exposure%20System%20Spectra-,Documentation,-%5Bedit%20%7C its Wiki page]. |
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| + | //15:59, 22 May 2024 (PDT) |
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| + | =====Velion FIB Tool DOWN===== |
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| − | // [[User:John_d|Demis D. John]] 17:18, 4 January 2024 (PST) |
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| + | Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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| − | =====Stepper #1 (GCA 6300) - Scheduled Maintenance===== |
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| − | The tool will be undergoing maintenance and be unavailable the following dates and times: |
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| + | =====Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics===== |
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| − | 1-18-24 at 8:00am to 1-18-24 at 6:00pm |
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| + | We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system. |
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| + | Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work. |
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| − | Please plan your processing activities accordingly. |
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| + | Sorry for the inconvenience. |
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| − | Bill Millerski |
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| − | //[[User:Mehalana v|Vraj Mehalana]] |
+ | //[[User:Mehalana v|Vraj Mehalana]] 19:04, 21 May 2024 (PDT) |
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| − | ===== Stepper #2 (GCA Autostep 200) - Scheduled Maintenance===== |
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| − | The tool will be undergoing maintenance and be unavailable the following dates and times: |
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| − | 1-15-24 at 8:00am to 1-17-24 at 6:00pm |
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| − | Please plan your processing activities accordingly. |
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| − | =====Job Opening: Process Engineer===== |
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| − | The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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=====Lab Access Changes: Symmetry App===== |
=====Lab Access Changes: Symmetry App===== |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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=====Wafer Bonder, (Suss SB6-8E)===== |
=====Wafer Bonder, (Suss SB6-8E)===== |
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| − | SUSS |
+ | SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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Latest revision as of 15:59, 22 May 2024
Atomic Force Microscope (Dimension ICON) - 05/17: System UP
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
//Vraj Mehalana 13:46, 20 May 2024 (PDT)
MA6 TSA is down - Update
We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool.
The tool remains up for backside alignment and topside exposures that do not require alignment.
-Lee //15:59, 22 May 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics
We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system.
Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work.
Sorry for the inconvenience.
//Vraj Mehalana 19:04, 21 May 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App". // John d 13:49, 7 November 2023 (PST)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)