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Oxford cobra sfotware bugs |
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=====Oxford |
=====Oxford Flexal ALD===== |
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The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday. |
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The latest revision of software has several bugs: see email for details. We are working with Oxford to resolve via software upgrade. |
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Sorry for any inconvenience this may cause. |
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Thanks |
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=====ASML Maintenance: Jan 29th-31st===== |
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The ASML will be down for periodic preventative maintenance on Jan 29th-Jan31st, please plan your process accordingly. |
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// [[User:John_d|Demis D. John]] 17:00, 11 January 2024 (PST) |
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Beginning Tuesday January 23rd, we will be pulling gowns and booties for refresh. Please remove all personal items from your suits prior to the week your section will be cleared. |
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// [[User:John_d|Demis D. John]] 07:28, 11 January 2024 (PST) |
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=====EBeam#1: UP===== |
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EBeam1 is UP. |
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// [[User:John_d|Demis D. John]] 10:07, 17 January 2024 (PST) |
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=====DUV Flood: UP with new procedure===== |
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The new parts have been installed and the tool has been tested. |
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We have added a timer that interlocks the lamp power supply since some users seem to have a problem remembering to turn the tool off when finished with it. The minimum time it can be set for is 30 minutes and the max is 4 hours. You will no longer be operating the main breaker on the front of the power supply. I have updated the SOP to reflect the changes, there is a copy at the tool and on [https://wiki.nanofab.ucsb.edu/wiki/DUV_Flood_Expose#Documentation:~:text=Exposure%20System%20Spectra-,Documentation,-%5Bedit%20%7C its Wiki page]. |
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// [[User:John_d|Demis D. John]] 17:18, 4 January 2024 (PST) |
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=====Stepper #1 (GCA 6300) - Scheduled Maintenance===== |
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The tool will be undergoing maintenance and be unavailable the following dates and times: |
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1-18-24 at 8:00am to 1-18-24 at 6:00pm |
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Please plan your processing activities accordingly. |
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Bill Millerski |
Bill Millerski |
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This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact [[Demis D. John]] for more information. |
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===== Stepper #2 (GCA Autostep 200) - Scheduled Maintenance===== |
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The tool will be undergoing maintenance and be unavailable the following dates and times: |
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1-15-24 at 8:00am to 1-17-24 at 6:00pm |
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Please plan your processing activities accordingly. |
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//[[User:Mehalana v|Vraj Mehalana]] 21:49, 21 December 2023 (PST) |
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=====Job Opening: Process Engineer===== |
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The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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//[[User:John d|Demis D. John]] 14:52, 30 October 2023 (PDT) |
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=====Lab Access Changes: Symmetry App===== |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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//[[User:Mehalana v|Vraj Mehalana]] 14: |
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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Latest revision as of 22:24, 13 August 2025
Oxford Flexal ALD
The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday.
Sorry for any inconvenience this may cause.
Thanks Bill Millerski //Vraj Mehalana 21:12, 12 August 2025 (UTC)
Suss SB6-8E
This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact Demis D. John for more information. // Demis D. John 04:28, 5 August 2025 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)