Template:Announcements: Difference between revisions

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=====Oxford Cobra: Software bugs=====
=====Lab is OPEN=====
We completed our work early and the lab is now open for use.
The latest revision of software has several bugs: see email for details. We are working with Oxford to resolve via software upgrade.
-- Tony
⚫
// [[User:John_d|Demis D. John]] 10:08, 17 January 2024 (PST)


//[[User:John_d|Demis D. John]] 22:23, 10 February 2025 (UTC)
=====ASML Maintenance: Jan 29th-31st=====
The ASML will be down for periodic preventative maintenance on Jan 29th-Jan31st, please plan your process accordingly.
⚫
// [[User:John_d|Demis D. John]] 17:00, 11 January 2024 (PST)


=====Gowning Refresh: Jan 23rd=====
=====Olympus DSX Microscope: Down=====
After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more.
Beginning Tuesday January 23rd, we will be pulling gowns and booties for refresh. Please remove all personal items from your suits prior to the week your section will be cleared.
-- Tony Bosch
// [[User:John_d|Demis D. John]] 07:28, 11 January 2024 (PST)
// [[User:John_d|Demis D. John]] 20:41, 5 February 2025 (UTC)


=====EBeam#1: UP=====
=====Stepper #3 (ASML DUV) - Maint moved to March 3rd=====
We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd.
EBeam1 is UP.
Please plan your work accordingly.
// [[User:John_d|Demis D. John]] 10:07, 17 January 2024 (PST)
// [[User:John_d|Demis D. John]] 19:44, 4 February 2025 (UTC)


=====DUV Flood: UP with new procedure=====
=====ICP #2 Maint: Complete=====
The new parts have been installed and the tool has been tested.


The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer
We have added a timer that interlocks the lamp power supply since some users seem to have a problem remembering to turn the tool off when finished with it. The minimum time it can be set for is 30 minutes and the max is 4 hours. You will no longer be operating the main breaker on the front of the power supply. I have updated the SOP to reflect the changes, there is a copy at the tool and on [https://wiki.nanofab.ucsb.edu/wiki/DUV_Flood_Expose#Documentation:~:text=Exposure%20System%20Spectra-,Documentation,-%5Bedit%20%7C its Wiki page].


// [[User:John_d|Demis D. John]] 17:18, 4 January 2024 (PST)
//[[User:John_d|Demis D. John]] 02:01, 5 February 2025 (UTC)


=====Job Opening: Process Engineer=====
=====Oxford ALD+Ion Mill: UP=====
The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details.


Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.
⚫
//[[User:John d|Demis D. John]] 14:52, 30 October 2023 (PDT)


Please use the original tool name on SUM to make all future tool reservations.
=====Lab Access Changes: Symmetry App=====
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''.


There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.
// [[User:John d|John d]] 13:49, 7 November 2023 (PST)


Please feel free to email me directly with any questions you may have.
⚫
=====Wafer Bonder, (Suss SB6-8E)=====

SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date.
Thanks
⚫
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST)
Bill Millerski
UCSB
//[[User:John_d|Demis D. John]] 19:48, 4 February 2025 (UTC)

=====New Gowns: Toolbelts purchases=====
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]

⚫
// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)

⚫
=====Suss SB6-8E=====
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one.
-Aidan
⚫
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)

=====ICP1 Down=====
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)


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Latest revision as of 22:23, 10 February 2025

Lab is OPEN

We completed our work early and the lab is now open for use. -- Tony

//Demis D. John 22:23, 10 February 2025 (UTC)

Olympus DSX Microscope: Down

After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more. -- Tony Bosch // Demis D. John 20:41, 5 February 2025 (UTC)

Stepper #3 (ASML DUV) - Maint moved to March 3rd

We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd. Please plan your work accordingly. // Demis D. John 19:44, 4 February 2025 (UTC)

ICP #2 Maint: Complete

The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer

//Demis D. John 02:01, 5 February 2025 (UTC)

Oxford ALD+Ion Mill: UP

The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.

Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.

Please use the original tool name on SUM to make all future tool reservations.

There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.

Please feel free to email me directly with any questions you may have.

Thanks Bill Millerski UCSB //Demis D. John 19:48, 4 February 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

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