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=====E-Beam #4 (CHA) - UP =====
===== SEM#1 update=====
The service engineer had to order some more parts for the SEM. He’ll be back tomorrow to continue troubleshooting the skewing issue. In the meantime, the tool is useable and is only showing the skewing issue within the mags of 5.5k to 8.5k. Please let me know if you encounter any other issues. Thanks, Aidan
Cryo replaced, system ready for use.
//[[User:John_d|Demis D. John]] 13:58, 14 February 2024 (PST)
// [[User:John_d|Demis D. John]] 21:49, 28 May 2025 (UTC)


=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - IMPORTANT: Please Read!=====
=====PECVD #2 is UP=====
We will be taking down the DSE to changeout the turbo pump next Wednesday (5/28). If all goes well the tool should only be down for the day. I’ll keep you updated with emails.
The tool is up, intial film checks show same dep. rates as before.
//[[User:John_d|Demis D. John]] 11:56, 13 February 2024 (PST)
// [[User:Mehalana v|Vraj Mehalana]] 21:48, 21 May 2025 (UTC)


=====RIE 5 is up=====
===== SignupMonkey + Wiki: Off-Campus Access=====
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.
RIE 5 is up except for processes that use SiCl4.


If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST)


https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update=====
We received most of the chamber assembly replacement parts today. We are still waiting on the lamps and chamber o-rings which are scheduled to be delivered in the next couple of days. Once we have all the parts, we'll start to reassemble the chamber.


-- Vraj
I'll send out an update in the next 2-3 days.
// [[User:John_d|Demis D. John]] 20:08, 22 April 2025 (UTC)


=====New Gowns: Toolbelts purchases=====
Thanks,
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
//[[User:Mehalana v|Vraj Mehalana]] 10:58, 5 February 2024 (PST)


Two vendors for cleanroom belts we are using are listed here, you may request others:
=====ICP #1 is down - Update=====
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
Replacing the battery on the board did not resolve the tool issue.
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]


// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)
Panasonic has located a replacement board for the tool. From what I gather they need to repair and test it and are hoping to have it ready to ship by the 16th. I'd like to add that there is the possibility that this will not resolve the issue but it is the best path forward at this point.


=====Suss SB6-8E=====
-Lee
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST)


I will send out an update once we have one.
=====EBeam3 Planned Maintenance 2/21/24 - 2/22/24=====
-Aidan
The transfer arm installation has been postponed until next week due to other equipment being down at this time.
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)


=====ICP1 Down=====
The work is now scheduled for 2/21/24 - 2/22/24.
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
Please plan accordingly.
//[[User:John_d|Demis D. John]] 11:56, 13 February 2024 (PST)
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)

=====Job Opening: Process Engineer=====
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details.

//[[User:John d|Demis D. John]] 14:52, 30 October 2023 (PDT)

=====Lab Access Changes: Symmetry App=====
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''.

// [[User:John d|John d]] 13:49, 7 November 2023 (PST)

=====Wafer Bonder, (Suss SB6-8E)=====
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date.
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST)


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Latest revision as of 22:24, 28 May 2025

SEM#1 update

The service engineer had to order some more parts for the SEM. He’ll be back tomorrow to continue troubleshooting the skewing issue. In the meantime, the tool is useable and is only showing the skewing issue within the mags of 5.5k to 8.5k. Please let me know if you encounter any other issues. Thanks, Aidan // Demis D. John 21:49, 28 May 2025 (UTC)

Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - IMPORTANT: Please Read!

We will be taking down the DSE to changeout the turbo pump next Wednesday (5/28). If all goes well the tool should only be down for the day. I’ll keep you updated with emails. // Vraj Mehalana 21:48, 21 May 2025 (UTC)

SignupMonkey + Wiki: Off-Campus Access

Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.

If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:

https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn

-- Vraj // Demis D. John 20:08, 22 April 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)