Difference between revisions of "Template:Announcements"

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(deleted EB4, other tools up. Updated ICP1 and DSE from emails.)
 
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<startfeed />
=====RIE 5 is up=====
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===== EBeam4 is up=====
RIE 5 is up except for processes that use SiCl4.
 
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EBeam4 is back up.
   
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The overnight regen of the cryo was completed this morning.
//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST)
 
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I then tested the operation of the hoist numerous times without issue.
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I tested the EBeam by running 200A of Ti without issue.
   
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System UP
=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update=====
 
We were able to start running recipes last night but we found the C4F8 MFC wasn’t controlling. I’ve ordered a new MFC that’s due to be on site Tuesday morning. If all goes well the tool should be up that afternoon.
 
//[[User:John_d|Demis D. John]] 11:18, 23 February 2024 (PST)
 
   
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//10:36, 30 May 2024 (PDT)
=====ICP #1 is down - Update=====
 
Some additional work is needed on the replacement board that we are waiting on. I have been informed that it will not be shipping until after the 20th (no solid date).
 
//[[User:John_d|Demis D. John]] 11:18, 23 February 2024 (PST)
 
   
=====EBeam3 Transfer Arm Upgrade - Postponed=====
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=====Stepper #1 (GCA 6300) - Tool availability=====
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Stepper #1 (6300) will be undergoing maintenance and be unavailable the following dates and times:
The Transfer Arm upgrade has been postponed again, this time due to motor driver compatibility issues.
 
   
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6-18-24 at 8:00am
I am waiting to hear back from the manufacturer so at this time I can not reschedule yet.
 
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Till
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6-20-24 at 5:00pm
   
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Please plan your processing activities accordingly.
I will send another notification when everything has been worked out, and I am ready to schedule the installation.
 
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//13:32, 1 June 2024 (PDT)
   
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=====Stepper #2 (GCA Autostep 200) - Tool availability=====
//[[User:John_d|Demis D. John]] 11:56, 13 February 2024 (PST)
 
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Stepper #2 (AutoStep 200) will be undergoing maintenance and be unavailable the following dates and times:
   
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6-21-24 at 8:00am
=====Job Opening: Process Engineer=====
 
  +
Till
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details.
 
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6-21-24 at 5:00pm
   
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Please plan your processing activities accordingly.
//[[User:John d|Demis D. John]] 14:52, 30 October 2023 (PDT)
 
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Thanks
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Bill Millerski
  +
UCSB
  +
//13:32, 1 June 2024 (PDT)
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=====Stepper #3 (ASML DUV) - System UP and calibrated=====
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We have finished calibrations,
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System is up.
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Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose.
 
//[[User:Mehalana v|Vraj Mehalana]] 11:17, 24 May 2024 (PDT)
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=====Unaxis VLR still Down=====
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The chiller has a decent sized ball of ice inside of it.
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I need to let that melt off before I can do a proper diagnosis of what is causing the high pressure cut off to trip when the refrigerant pressures seem normal.
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//13:29, 1 June 2024 (PDT)
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//[[User:Mehalana v|Vraj Mehalana]] 11:17, 24 May 2024 (PDT)
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=====Atomic Force Microscope (Dimension ICON) - 05/17: System UP=====
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Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
  +
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//[[User:Mehalana v|Vraj Mehalana]] 13:46, 20 May 2024 (PDT)
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=====MA6 TSA is down - Update=====
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Due to unforeseen circumstances our FSE will not be onsite next week to work on the TSA microscope. They have rescheduled with us for Thursday of the following week, 6/13. I apologize for the inconvenience.
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Per my previous email, there is a MA6 available for use at CNSI. Here is a link to the webpage for their tools:
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https://www.cnsi.ucsb.edu/facilities/quantum-structures/nanofabrication
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  +
-Lee
  +
//15:59, 22 May 2024 (PDT)
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=====Velion FIB Tool DOWN=====
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Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
  +
 
//[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT)
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=====ICP1 Down=====
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
 
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)
   
 
=====Lab Access Changes: Symmetry App=====
 
=====Lab Access Changes: Symmetry App=====
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The iris scanner has been decommissioned. Please use the card reader which supports:
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''.
 
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-Physical card
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-Mobile phone via Symmetry App
   
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//10:54, 23 May 2024 (PDT)
// [[User:John d|John d]] 13:49, 7 November 2023 (PST)
 
   
 
=====Wafer Bonder, (Suss SB6-8E)=====
 
=====Wafer Bonder, (Suss SB6-8E)=====

Latest revision as of 13:32, 1 June 2024

EBeam4 is up

EBeam4 is back up.

The overnight regen of the cryo was completed this morning. I then tested the operation of the hoist numerous times without issue. I tested the EBeam by running 200A of Ti without issue.

System UP

//10:36, 30 May 2024 (PDT)

Stepper #1 (GCA 6300) - Tool availability

Stepper #1 (6300) will be undergoing maintenance and be unavailable the following dates and times:

6-18-24 at 8:00am Till 6-20-24 at 5:00pm

Please plan your processing activities accordingly. //13:32, 1 June 2024 (PDT)

Stepper #2 (GCA Autostep 200) - Tool availability

Stepper #2 (AutoStep 200) will be undergoing maintenance and be unavailable the following dates and times:

6-21-24 at 8:00am Till 6-21-24 at 5:00pm

Please plan your processing activities accordingly.

Thanks Bill Millerski UCSB //13:32, 1 June 2024 (PDT)

Stepper #3 (ASML DUV) - System UP and calibrated

We have finished calibrations, System is up.

Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. //Vraj Mehalana 11:17, 24 May 2024 (PDT)

Unaxis VLR still Down

The chiller has a decent sized ball of ice inside of it.

I need to let that melt off before I can do a proper diagnosis of what is causing the high pressure cut off to trip when the refrigerant pressures seem normal. //13:29, 1 June 2024 (PDT)

//Vraj Mehalana 11:17, 24 May 2024 (PDT)

Atomic Force Microscope (Dimension ICON) - 05/17: System UP

Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!

//Vraj Mehalana 13:46, 20 May 2024 (PDT)

MA6 TSA is down - Update

Due to unforeseen circumstances our FSE will not be onsite next week to work on the TSA microscope. They have rescheduled with us for Thursday of the following week, 6/13. I apologize for the inconvenience.

Per my previous email, there is a MA6 available for use at CNSI. Here is a link to the webpage for their tools:

https://www.cnsi.ucsb.edu/facilities/quantum-structures/nanofabrication

-Lee //15:59, 22 May 2024 (PDT)

Velion FIB Tool DOWN

Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.

//Vraj Mehalana 10:58, 30 April 2024 (PDT)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

Lab Access Changes: Symmetry App

The iris scanner has been decommissioned. Please use the card reader which supports:

-Physical card

-Mobile phone via Symmetry App

//10:54, 23 May 2024 (PDT)

Wafer Bonder, (Suss SB6-8E)

SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)