Difference between revisions of "Template:Announcements"

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=====Stepper #3 (ASML DUV) - System UP and calibrated=====
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=====MLA Service this Tuesday=====
  +
HIMT will be onsite around 9am this Tuesday to address a minor issue with the tool. I have the blocked out until 5 pm but we do not anticipate it taking that long, hopefully about 4-5 hours. I'll send out an email once the tool is available.
We have finished calibrations,
 
System is up.
 
   
 
-Lee
Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose.
 
 
//[[User:Mehalana v|Vraj Mehalana]] 12:20, 27 September 2024 (PDT)
   
 
=====DSE is UP=====
//[[User:Mehalana v|Vraj Mehalana]] 11:17, 24 May 2024 (PDT)
 
  +
I’ve completed the installation of the new spool and lamps and the tool is free to use. We’ve run a number of different etches and upon initial inspection everything looks normal. However, it’s recommended you start with a test etch in case there is a slight shift in process.
   
  +
Thanks, Aidan
=====Atomic Force Microscope (Dimension ICON) - 05/17: System UP=====
 
 
// [[User:John_d|Demis D. John]] 12:36, 20 September 2024 (PDT)
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
 
   
 
=====Suss SB6-8E=====
//[[User:Mehalana v|Vraj Mehalana]] 13:46, 20 May 2024 (PDT)
 
  +
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
   
  +
-Aidan
=====MA6 TSA is down - Update=====
 
 
//[[User:Mehalana v|Vraj Mehalana]] 12:43, 3 September 2024 (PDT)
We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool.
 
   
  +
=====YES is available=====
The tool remains up for backside alignment and topside exposures that do not require alignment.
 
  +
The error has been cleared and I ran a shorter 5 minute recipe with no warning/error.
   
  +
This seems to be exclusive to the longer (8+ minute recipes), which are throwing warnings for every wafer run this long. It also appears that running 3 wafers on a longer recipe will result in an error and aborted run on the 3rd wafer. We are just going to have to live with this until we have our other generator back. So until then, please limit the longer runs to 2 wafers max. If you have more than 2 wafers to run on a longer recipe then wait about 5-10 minutes in between batches.
-Lee
 
//15:59, 22 May 2024 (PDT)
 
   
 
// [[User:Mehalana v|Vraj Mehalana]] 14:16, 18 September 2024 (PDT)
=====Velion FIB Tool DOWN=====
 
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
 
 
//[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT)
 
   
 
=====ICP1 Down=====
 
=====ICP1 Down=====
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-Mobile phone via Symmetry App
 
-Mobile phone via Symmetry App
   
//10:54, 23 May 2024 (PDT)
+
//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT)
 
=====Wafer Bonder, (Suss SB6-8E)=====
 
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date.
 
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST)
 
   
 
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Latest revision as of 12:20, 27 September 2024

MLA Service this Tuesday

HIMT will be onsite around 9am this Tuesday to address a minor issue with the tool. I have the blocked out until 5 pm but we do not anticipate it taking that long, hopefully about 4-5 hours. I'll send out an email once the tool is available.

-Lee //Vraj Mehalana 12:20, 27 September 2024 (PDT)

DSE is UP

I’ve completed the installation of the new spool and lamps and the tool is free to use. We’ve run a number of different etches and upon initial inspection everything looks normal. However, it’s recommended you start with a test etch in case there is a slight shift in process.

Thanks, Aidan // Demis D. John 12:36, 20 September 2024 (PDT)

Suss SB6-8E

When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.

-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)

YES is available

The error has been cleared and I ran a shorter 5 minute recipe with no warning/error.

This seems to be exclusive to the longer (8+ minute recipes), which are throwing warnings for every wafer run this long. It also appears that running 3 wafers on a longer recipe will result in an error and aborted run on the 3rd wafer. We are just going to have to live with this until we have our other generator back. So until then, please limit the longer runs to 2 wafers max. If you have more than 2 wafers to run on a longer recipe then wait about 5-10 minutes in between batches.

// Vraj Mehalana 14:16, 18 September 2024 (PDT)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

Lab Access Changes: Symmetry App

The iris scanner has been decommissioned. Please use the card reader which supports:

-Physical card

-Mobile phone via Symmetry App

//Vraj Mehalana 16:59, 14 June 2024 (PDT)