Template:Announcements: Difference between revisions
(lab closure house vacuum) |
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=====LAB CLOSED 8a-9am, Friday Sept 5th, 2024===== |
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We need to change the oil in our house vacuum system tomorrow morning from 8 a.m. until 9 a.m. please schedule your process accordingly. I apologize for the short notice. |
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===== EVG is down - Update===== |
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Thanks, |
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I checked in with our vendor today as it has been 2 weeks since they got started on our RF generator. They are waiting on a part for it that should be arriving on Monday. If all goes well we should have the unit back late next week. I'll check with the vendor again on Wednesday and send out another update. |
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-Lee |
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Michael Silva |
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// |
//[[User:Mehalana v|Vraj Mehalana]] 16:48, 17 October 2024 (UTC) |
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===== E- Beam #2 Maint Work Next Week===== |
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E-Beam #2 will be down next Wednesday (10/16) and possibly into Thursday to replace the hoist sensors. This will also reduce the likelihood of future issues with the hoist which we dealt with recently. I will send an email out once the work is completed. |
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-Lee |
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=====Stepper #3 (ASML DUV) - Tool UP===== |
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We finished calibrations, tool is up and ready for use. |
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No limit on number of wafers. |
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Input has been set back to port # 1 (right) cassette, outputting to Left cassette (Port #2). // [[User:John_d|Demis D. John]] 17:36, 9 October 2024 (PDT) |
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=====Suss SB6-8E===== |
=====Suss SB6-8E===== |
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-Aidan |
-Aidan |
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//[[User:Mehalana v|Vraj Mehalana]] 12:43, 3 September 2024 (PDT) |
//[[User:Mehalana v|Vraj Mehalana]] 12:43, 3 September 2024 (PDT) |
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=====MLA150: Down===== |
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The tool is down due to the intermittent head crash issue. I am waiting to hear back from the vendor as to when we will have someone out to look at it. --Lee |
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=====EBeam#2: Down===== |
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Good news is we have repaired and reinstalled the hoist, thanks Mike B. and Bill. I have tested it and everything looks good. |
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However, the repaired bell jar mount is not sliding down the hoist pole like it should. Since the repair involved some welding to the collar that slides down the hoist pole, we surmise that the concentricity was affected by the heat. The mount is back at the machine shop getting honed out. I should have it back to test late today/early tomorrow but it may have to go back again. Once it is able to slide on properly the tool should be up shortly thereafter. |
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-Lee // [[User:John_d|Demis D. John]] 14:24, 27 August 2024 (PDT) |
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=====YES EcoClean: 3kW only===== |
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I swapped out the RF generator and the tool is working again. I am getting repeated CCP warnings for the 0.7kW recipes so we will need to look into that further. |
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System is up for 3kW recipes only. |
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DO NOT run 0.7kW recipes until further notice!! |
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-- |
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Lee Sawyer//[[User:John_d|Demis D. John]] 11:31, 23 August 2024 (PDT) |
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=====ICP1 Down===== |
=====ICP1 Down===== |
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Latest revision as of 16:48, 17 October 2024
EVG is down - Update
I checked in with our vendor today as it has been 2 weeks since they got started on our RF generator. They are waiting on a part for it that should be arriving on Monday. If all goes well we should have the unit back late next week. I'll check with the vendor again on Wednesday and send out another update.
-Lee //Vraj Mehalana 16:48, 17 October 2024 (UTC)
E- Beam #2 Maint Work Next Week
E-Beam #2 will be down next Wednesday (10/16) and possibly into Thursday to replace the hoist sensors. This will also reduce the likelihood of future issues with the hoist which we dealt with recently. I will send an email out once the work is completed.
-Lee //Vraj Mehalana 13:23, 10 October 2024 (PDT)
Stepper #3 (ASML DUV) - Tool UP
We finished calibrations, tool is up and ready for use. No limit on number of wafers.
Input has been set back to port # 1 (right) cassette, outputting to Left cassette (Port #2). // Demis D. John 17:36, 9 October 2024 (PDT)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)