Template:Announcements: Difference between revisions
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=====Oxford ALD+Ion Mill===== |
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The vendor (Oxford) will be on site Tuesday the 10th until Friday the 13th to address various issues with this tool and it will be unavailable for use. -- Millerski |
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I have determined that the laser used for Alignment is failing, the power is low and it flickers. |
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=====Holography/PL: HeCd Laser Down Mon Dec 16th===== |
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We will order a replacement ASAP and schedule an ASML engineering visit to install + calibrate a new one. |
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The 325nm UV Laser will be unavailable from Mon. Dec 16th, through the christmas shutdown, and will be available again on Monday Jan 6th (or possibly earlier). |
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We will be installing the refurbished laser which will have higher output power. |
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Holography will be unavailable during this time, but all other PL lasers will be available. |
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In the mean time, I'm sorry to say that you will see intermittent "reject" wafers. Please see email for info on recovering from this error. |
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=====Lab Shutdown: Dec 26 to Jan 3rd===== |
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We will be shutting down the lab for year end maintenance activities at 7am December 26th. The current plan is to open back up at 7am on January 3rd. We will update the schedule if needed. |
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House vacuum repair has been completed, lab is open for use. |
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//[[User:John_d|Demis D. John]] 12:13, 6 September 2024 (PDT) |
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During the shutdown this year we will be pulling all cleanroom suits and stocking new suits. |
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=====MLA150: Down===== |
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Heidelberg engineer is on site working on repair, we will update as we learn more. |
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PLEASE REMOVE ALL PERSONAL ITEMS FROM THE GOWNING ROOM PRIOR TO DECEMBER 26TH |
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=====IBD is down untilll further notice===== |
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The fixture was not on the transfer arm properly when it was being loaded into the chamber, which caused it to be jammed in the slip valve between the loadlock and chamber. |
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//[[User: |
//[[User:John_d|Demis D. John]] 16:55, 24 November 2024 (UTC) |
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We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for tool belts you can use. |
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=====Suss SB6-8E===== |
=====Suss SB6-8E===== |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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I will send out an update once we have one. |
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-Aidan |
-Aidan |
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//[[User: |
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC) |
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=====EBeam#2: Down===== |
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Good news is we have repaired and reinstalled the hoist, thanks Mike B. and Bill. I have tested it and everything looks good. |
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However, the repaired bell jar mount is not sliding down the hoist pole like it should. Since the repair involved some welding to the collar that slides down the hoist pole, we surmise that the concentricity was affected by the heat. The mount is back at the machine shop getting honed out. I should have it back to test late today/early tomorrow but it may have to go back again. Once it is able to slide on properly the tool should be up shortly thereafter. |
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-Lee // [[User:John_d|Demis D. John]] 14:24, 27 August 2024 (PDT) |
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=====YES EcoClean: 3kW only===== |
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I swapped out the RF generator and the tool is working again. I am getting repeated CCP warnings for the 0.7kW recipes so we will need to look into that further. |
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System is up for 3kW recipes only. |
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DO NOT run 0.7kW recipes until further notice!! |
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-- |
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Lee Sawyer//[[User:John_d|Demis D. John]] 11:31, 23 August 2024 (PDT) |
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=====ICP1 Down===== |
=====ICP1 Down===== |
Latest revision as of 00:35, 8 December 2024
Oxford ALD+Ion Mill
The vendor (Oxford) will be on site Tuesday the 10th until Friday the 13th to address various issues with this tool and it will be unavailable for use. -- Millerski // Demis D. John 00:34, 8 December 2024 (UTC)
Holography/PL: HeCd Laser Down Mon Dec 16th
The 325nm UV Laser will be unavailable from Mon. Dec 16th, through the christmas shutdown, and will be available again on Monday Jan 6th (or possibly earlier). We will be installing the refurbished laser which will have higher output power.
Holography will be unavailable during this time, but all other PL lasers will be available. // Demis D. John 17:56, 7 December 2024 (UTC)
Lab Shutdown: Dec 26 to Jan 3rd
We will be shutting down the lab for year end maintenance activities at 7am December 26th. The current plan is to open back up at 7am on January 3rd. We will update the schedule if needed.
During the shutdown this year we will be pulling all cleanroom suits and stocking new suits.
PLEASE REMOVE ALL PERSONAL ITEMS FROM THE GOWNING ROOM PRIOR TO DECEMBER 26TH
//Demis D. John 16:55, 24 November 2024 (UTC)
New Gowns in Jan
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for tool belts you can use. // Demis D. John 16:58, 24 November 2024 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)