Template:Announcements: Difference between revisions
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===== EVG is down - Update===== |
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I checked in with our vendor today as it has been 2 weeks since they got started on our RF generator. They are waiting on a part for it that should be arriving on Monday. If all goes well we should have the unit back late next week. I'll check with the vendor again on Wednesday and send out another update. |
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Optical AF has been calibrated and Defocus + Dose values are the same as before. PneuAF has not been checked et, but we expect a shift in PneuAF Defocus due to the Pneumatic nozzle replacement. |
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-Lee |
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//[[User:Mehalana v|Vraj Mehalana]] 16:48, 17 October 2024 (UTC) |
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The alignment laser has now fully failed (no laser output at all), so we can't perform any exposures. |
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ASML engineers will be on site Monday Tues (Sept 16th) to perform the repair. |
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// [[User:John_d|Demis D. John]] 18:14, 11 September 2024 (PDT) |
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===== E- Beam #2 Maint Work Next Week===== |
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E-Beam #2 will be down next Wednesday (10/16) and possibly into Thursday to replace the hoist sensors. This will also reduce the likelihood of future issues with the hoist which we dealt with recently. I will send an email out once the work is completed. |
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-Lee |
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=====IBD is DOWN===== |
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The IBD is still Down, Depo failing to ignite. We will continue to look into these tomorrow. |
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-- Barreraz // [[User:John_d|Demis D. John]] 18:14, 11 September 2024 (PDT) |
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We finished calibrations, tool is up and ready for use. |
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No limit on number of wafers. |
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Input has been set back to port # 1 (right) cassette, outputting to Left cassette (Port #2). // [[User:John_d|Demis D. John]] 17:36, 9 October 2024 (PDT) |
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=====Suss SB6-8E===== |
=====Suss SB6-8E===== |
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-Aidan |
-Aidan |
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//[[User:Mehalana v|Vraj Mehalana]] 12:43, 3 September 2024 (PDT) |
//[[User:Mehalana v|Vraj Mehalana]] 12:43, 3 September 2024 (PDT) |
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=====EBeam#2: Up===== |
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Bell jar mount is in place. Hoist has been tested several times. System is ready to use. |
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// [[User:John_d|Demis D. John]] 18:14, 11 September 2024 (PDT) |
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=====YES EcoClean: 3kW only===== |
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the YES has been giving downstream temp warnings for the RF generator. These happen on the 3000W recipes that run for more than 4-5 minutes, and are just warnings (yellow banner/light), and can just be acknowledged without notifying Staff. Our other generator is out for repair, so this will be the norm until we get it back. Please let us know if you do get an error for this; red banner/light. |
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// [[User:John_d|Demis D. John]] 18:14, 11 September 2024 (PDT) |
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=====ICP1 Down===== |
=====ICP1 Down===== |
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Latest revision as of 16:48, 17 October 2024
EVG is down - Update
I checked in with our vendor today as it has been 2 weeks since they got started on our RF generator. They are waiting on a part for it that should be arriving on Monday. If all goes well we should have the unit back late next week. I'll check with the vendor again on Wednesday and send out another update.
-Lee //Vraj Mehalana 16:48, 17 October 2024 (UTC)
E- Beam #2 Maint Work Next Week
E-Beam #2 will be down next Wednesday (10/16) and possibly into Thursday to replace the hoist sensors. This will also reduce the likelihood of future issues with the hoist which we dealt with recently. I will send an email out once the work is completed.
-Lee //Vraj Mehalana 13:23, 10 October 2024 (PDT)
Stepper #3 (ASML DUV) - Tool UP
We finished calibrations, tool is up and ready for use. No limit on number of wafers.
Input has been set back to port # 1 (right) cassette, outputting to Left cassette (Port #2). // Demis D. John 17:36, 9 October 2024 (PDT)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)