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===== Raith EBL Update ===== |
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Unfortunately the fix discussed in the last update turned out to be a good news/bad news thing. The good news is that the majority of the field distortion problem we have experienced since the install has been addressed. However the bad news is that there is still a residual settling effect that is distorting the field in one part of the field only and prevents the tool from fully meeting specifications. So it turned out to a layers of an onion kind of thing – because of course it did. |
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So the suspect now is the fine focus coil in the column (one of the factory engineers predicted stitch shifts when a faulty fine focus coil is present which essentially replicated the errors we are now seeing) and the question now is how to get one of these sent to UCSB. They are a factory install item so for us to get one, and one that has been tested and confirmed to be fully operational, would require it to be taken from a tool currently under fabrication on the production line. |
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=====MLA150: UP===== |
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Optical AF has been calibrated and Defocus + Dose values are the same as before. PneuAF has not been checked et, but we expect a shift in PneuAF Defocus due to the Pneumatic nozzle replacement. |
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We are close, very close, but still not quite there. And I am really sorry that is still the case… |
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=====Stepper #3 (ASML DUV) - Down, update===== |
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-Bill |
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The alignment laser has now fully failed (no laser output at all), so we can't perform any exposures. |
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ASML engineers will be on site Monday Tues (Sept 16th) to perform the repair. |
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===== SignupMonkey + Wiki: Off-Campus Access===== |
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Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey. |
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The IBD is still Down, Depo failing to ignite. We will continue to look into these tomorrow. |
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-- Barreraz // [[User:John_d|Demis D. John]] 18:14, 11 September 2024 (PDT) |
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If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab: |
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https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn |
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-- Vraj |
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=====Suss SB6-8E===== |
=====Suss SB6-8E===== |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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I will send out an update once we have one. |
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-Aidan |
-Aidan |
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//[[User: |
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC) |
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=====EBeam#2: Up===== |
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Bell jar mount is in place. Hoist has been tested several times. System is ready to use. |
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// [[User:John_d|Demis D. John]] 18:14, 11 September 2024 (PDT) |
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=====YES EcoClean: 3kW only===== |
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the YES has been giving downstream temp warnings for the RF generator. These happen on the 3000W recipes that run for more than 4-5 minutes, and are just warnings (yellow banner/light), and can just be acknowledged without notifying Staff. Our other generator is out for repair, so this will be the norm until we get it back. Please let us know if you do get an error for this; red banner/light. |
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// [[User:John_d|Demis D. John]] 18:14, 11 September 2024 (PDT) |
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=====ICP1 Down===== |
=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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=====Lab Access Changes: Symmetry App===== |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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-Physical card |
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-Mobile phone via Symmetry App |
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//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
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Latest revision as of 22:53, 13 June 2025
Raith EBL Update
Unfortunately the fix discussed in the last update turned out to be a good news/bad news thing. The good news is that the majority of the field distortion problem we have experienced since the install has been addressed. However the bad news is that there is still a residual settling effect that is distorting the field in one part of the field only and prevents the tool from fully meeting specifications. So it turned out to a layers of an onion kind of thing – because of course it did.
So the suspect now is the fine focus coil in the column (one of the factory engineers predicted stitch shifts when a faulty fine focus coil is present which essentially replicated the errors we are now seeing) and the question now is how to get one of these sent to UCSB. They are a factory install item so for us to get one, and one that has been tested and confirmed to be fully operational, would require it to be taken from a tool currently under fabrication on the production line.
We are close, very close, but still not quite there. And I am really sorry that is still the case… -Bill // Demis D. John 22:53, 13 June 2025 (UTC)
SignupMonkey + Wiki: Off-Campus Access
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.
If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
-- Vraj // Demis D. John 20:08, 22 April 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)