Template:Announcements: Difference between revisions

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=====IBD is UP=====
=====Lab is OPEN=====
We completed our work early and the lab is now open for use.
Replaced bad PLC controller on Depo beam. I then tested the beam with a 15 min gridclean recipe without issue.
-- Tony
I then ran an SiO2 dep, and a 1 hour gridclean without issue.


⚫
//[[User:John_d|Demis D. John]] 22:23, 10 February 2025 (UTC)
System UP - Mike Barreraz
⚫
// [[User:John_d|Demis D. John]] 14:18, 12 September 2024 (PDT)


=====Olympus DSX Microscope: Down=====
=====Focused Ion Beam (Raith Velion) - TOOL DOWN for Raith Service=====
After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more.
Some users have experienced issues with column alignment when using Au ions. Raith service will be onsite today and tomrrow to make adjustments. I'll run checks and calibrations over the weekend. I expect the Raith Velion to be available again on Monday morning (Sept 16th). I'll send further updates if anything changes.
-- Tony Bosch
⚫
// [[User:John_d|Demis D. John]] 20:41, 5 February 2025 (UTC)


⚫
=====Stepper #3 (ASML DUV) - Maint moved to March 3rd=====
-Dan
We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 10:58, 12 September 2024 (PDT)
Please plan your work accordingly.
⚫
// [[User:John_d|Demis D. John]] 19:44, 4 February 2025 (UTC)


=====Lab Closure Monday the 16th=====
=====ICP #2 Maint: Complete=====
We will be closing the Nanofab Monday, September 16, 2024 from 7 a.m. until 8:30 a.m. to accommodate the testing of the fire alarm system. Please schedule your process accordingly.
// [[User:Mehalana v|Vraj Mehalana]] 10:57, 12 September 2024 (PDT)


The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer
⚫
=====MLA150: UP=====
Optical AF has been calibrated and Defocus + Dose values are the same as before. PneuAF has not been checked et, but we expect a shift in PneuAF Defocus due to the Pneumatic nozzle replacement.
⚫
// [[User:John_d|Demis D. John]] 18:14, 11 September 2024 (PDT)


⚫
//[[User:John_d|Demis D. John]] 02:01, 5 February 2025 (UTC)
⚫
=====Stepper #3 (ASML DUV) - Down, update=====
The alignment laser has now fully failed (no laser output at all), so we can't perform any exposures.
ASML engineers will be on site Monday Tues (Sept 16th) to perform the repair.
⚫
// [[User:John_d|Demis D. John]] 18:14, 11 September 2024 (PDT)


=====Suss SB6-8E=====
=====Oxford ALD+Ion Mill: UP=====
The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.


Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.
⚫
-Aidan
//[[User:Mehalana v|Vraj Mehalana]] 12:43, 3 September 2024 (PDT)


Please use the original tool name on SUM to make all future tool reservations.
⚫
=====EBeam#2: Up=====
Bell jar mount is in place. Hoist has been tested several times. System is ready to use.
⚫
// [[User:John_d|Demis D. John]] 18:14, 11 September 2024 (PDT)


There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.
=====YES EcoClean UP=====
The YES has been giving downstream temp warnings for the RF generator. These happen on the 3000W recipes that run for more than 4-5 minutes, and are just warnings (yellow banner/light), and can just be acknowledged without notifying Staff. Our other generator is out for repair, so this will be the norm until we get it back. Please let us know if you do get an error for this; red banner/light.
⚫
// [[User:John_d|Demis D. John]] 18:14, 11 September 2024 (PDT)


Please feel free to email me directly with any questions you may have.
=====ICP1 Down=====
⚫
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)


Thanks
=====Lab Access Changes: Symmetry App=====
Bill Millerski
The iris scanner has been decommissioned. Please use the card reader which supports:
UCSB
//[[User:John_d|Demis D. John]] 19:48, 4 February 2025 (UTC)


=====New Gowns: Toolbelts purchases=====
-Physical card
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.


Two vendors for cleanroom belts we are using are listed here, you may request others:
-Mobile phone via Symmetry App
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]


//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT)
// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)

⚫
=====Suss SB6-8E=====
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one.
⚫
-Aidan
⚫
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)

⚫
=====ICP1 Down=====
⚫
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)


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Latest revision as of 22:23, 10 February 2025

Lab is OPEN

We completed our work early and the lab is now open for use. -- Tony

//Demis D. John 22:23, 10 February 2025 (UTC)

Olympus DSX Microscope: Down

After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more. -- Tony Bosch // Demis D. John 20:41, 5 February 2025 (UTC)

Stepper #3 (ASML DUV) - Maint moved to March 3rd

We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd. Please plan your work accordingly. // Demis D. John 19:44, 4 February 2025 (UTC)

ICP #2 Maint: Complete

The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer

//Demis D. John 02:01, 5 February 2025 (UTC)

Oxford ALD+Ion Mill: UP

The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.

Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.

Please use the original tool name on SUM to make all future tool reservations.

There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.

Please feel free to email me directly with any questions you may have.

Thanks Bill Millerski UCSB //Demis D. John 19:48, 4 February 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

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