Template:Announcements: Difference between revisions

From UCSB Nanofab Wiki
Jump to navigation Jump to search
No edit summary
(EBL move update)
 
(57 intermediate revisions by 3 users not shown)
Line 1: Line 1:
<startfeed />
<startfeed />
=====DSE is UP=====
=====EBL Move-In: Tues 9-11a=====
Users,
I’ve completed the installation of the new spool and lamps and the tool is free to use. We’ve run a number of different etches and upon initial inspection everything looks normal. However, it’s recommended you start with a test etch in case there is a slight shift in process.


Thank you for your patience while we moved the new EBL system in.
Thanks, Aidan
⚫
// [[User:John_d|Demis D. John]] 12:36, 20 September 2024 (PDT)


The lab is fully open for use.
⚫
=====IBD is UP=====
Replaced bad PLC controller on Depo beam. I then tested the beam with a 15 min gridclean recipe without issue.
I then ran an SiO2 dep, and a 1 hour gridclean without issue.


Peder Lenvik
System UP - Mike Barreraz
⚫
// [[User:John_d|Demis D. John]] 14:18, 12 September 2024 (PDT)
Sr. Facilities Lead
// [[User:John_d|Demis D. John]] 23:47, 10 March 2025 (UTC)


⚫
=====MLA150 is UP=====
=====Focused Ion Beam (Raith Velion) - TOOL DOWN for Raith Service=====
System will be available at 12:30 today (Fri Mar 7th). No changes to OAF settings but PAF has moved about 10 points positive for focus. We will work on adjusting PAF back to around 0 (on our cal resist) some time next week.
Raith service need to work on the Velion a little longer than anticipated. I'll keep the tool down until 2pm tomorrow (Tuesday). I'll send further updates if anything changes.
-Lee
//[[User:John_d|Demis D. John]] 20:51, 7 March 2025 (UTC)


⚫
=====Stepper #3 (ASML DUV) - Maint Complete =====
-Dan
ASML Maintenance is complete, the system is up.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 10:58, 12 September 2024 (PDT)
⚫
// [[User:John_d|Demis D. John]] 02:18, 7 March 2025 (UTC)


=====MLA150: UP=====
=====RIE #5 Down: Mon March 13th =====
RIE #5 will be down Monday March 13th through the end of Wednesday March 15th for maintenance.
Optical AF has been calibrated and Defocus + Dose values are the same as before. PneuAF has not been checked et, but we expect a shift in PneuAF Defocus due to the Pneumatic nozzle replacement.
⚫
// [[User:John_d|Demis D. John]] 18:14, 11 September 2024 (PDT)


If we complete the job early we will send a follow-up email releasing the system.
⚫
=====Stepper #3 (ASML DUV) - Down, update=====
The alignment laser has now fully failed (no laser output at all), so we can't perform any exposures.
ASML engineers will be on site Monday Tues (Sept 16th) to perform the repair.
⚫
// [[User:John_d|Demis D. John]] 18:14, 11 September 2024 (PDT)


⚫
//[[User:Mehalana v|Vraj Mehalana]] 09:46, 21 February 2025 (UTC)
⚫
=====Suss SB6-8E=====
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.


=====New Gowns: Toolbelts purchases=====
⚫
-Aidan
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
//[[User:Mehalana v|Vraj Mehalana]] 12:43, 3 September 2024 (PDT)


Two vendors for cleanroom belts we are using are listed here, you may request others:
=====YES is available=====
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
The error has been cleared and I ran a shorter 5 minute recipe with no warning/error.
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]


⚫
// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)
This seems to be exclusive to the longer (8+ minute recipes), which are throwing warnings for every wafer run this long. It also appears that running 3 wafers on a longer recipe will result in an error and aborted run on the 3rd wafer. We are just going to have to live with this until we have our other generator back. So until then, please limit the longer runs to 2 wafers max. If you have more than 2 wafers to run on a longer recipe then wait about 5-10 minutes in between batches.


⚫
=====Suss SB6-8E=====
// [[User:Mehalana v|Vraj Mehalana]] 14:16, 18 September 2024 (PDT)
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one.
⚫
-Aidan
⚫
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)


=====ICP1 Down=====
=====ICP1 Down=====
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)

=====Lab Access Changes: Symmetry App=====
The iris scanner has been decommissioned. Please use the card reader which supports:

-Physical card

-Mobile phone via Symmetry App

//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT)


<!--
<!--

Latest revision as of 19:15, 11 March 2025

EBL Move-In: Tues 9-11a

Users,

Thank you for your patience while we moved the new EBL system in.

The lab is fully open for use.

Peder Lenvik

Sr. Facilities Lead // Demis D. John 23:47, 10 March 2025 (UTC)

MLA150 is UP

System will be available at 12:30 today (Fri Mar 7th). No changes to OAF settings but PAF has moved about 10 points positive for focus. We will work on adjusting PAF back to around 0 (on our cal resist) some time next week. -Lee //Demis D. John 20:51, 7 March 2025 (UTC)

Stepper #3 (ASML DUV) - Maint Complete

ASML Maintenance is complete, the system is up. // Demis D. John 02:18, 7 March 2025 (UTC)

RIE #5 Down: Mon March 13th

RIE #5 will be down Monday March 13th through the end of Wednesday March 15th for maintenance.

If we complete the job early we will send a follow-up email releasing the system.

//Vraj Mehalana 09:46, 21 February 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Template:Announcements&oldid=162896"