Template:Announcements: Difference between revisions
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===== EVG is down - Update===== |
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I checked in with our vendor today as it has been 2 weeks since they got started on our RF generator. They are waiting on a part for it that should be arriving on Monday. If all goes well we should have the unit back late next week. I'll check with the vendor again on Wednesday and send out another update. |
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-Lee |
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//[[User:Mehalana v|Vraj Mehalana]] 16:48, 17 October 2024 (UTC) |
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===== E- Beam #2 Maint Work Next Week===== |
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E-Beam #2 will be down next Wednesday (10/16) and possibly into Thursday to replace the hoist sensors. This will also reduce the likelihood of future issues with the hoist which we dealt with recently. I will send an email out once the work is completed. |
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-Lee |
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//[[User:Mehalana v|Vraj Mehalana]] 13:23, 10 October 2024 (PDT) |
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=====Stepper #3 (ASML DUV) - Tool UP===== |
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I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC. |
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Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair). |
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Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // [[User:John_d|Demis D. John]] 00:39, 22 October 2024 (UTC) |
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=====Suss SB6-8E===== |
=====Suss SB6-8E===== |
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Latest revision as of 00:45, 7 November 2024
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)