Template:Announcements: Difference between revisions
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=====EBL Move-In: Tues 9-11a===== |
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Users, |
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Thank you for your patience while we moved the new EBL system in. |
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I checked in with our vendor today as it has been 2 weeks since they got started on our RF generator. They are waiting on a part for it that should be arriving on Monday. If all goes well we should have the unit back late next week. I'll check with the vendor again on Wednesday and send out another update. |
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The lab is fully open for use. |
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Peder Lenvik |
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Sr. Facilities Lead |
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// [[User:John_d|Demis D. John]] 23:47, 10 March 2025 (UTC) |
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System will be available at 12:30 today (Fri Mar 7th). No changes to OAF settings but PAF has moved about 10 points positive for focus. We will work on adjusting PAF back to around 0 (on our cal resist) some time next week. |
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-Lee |
-Lee |
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//[[User: |
//[[User:John_d|Demis D. John]] 20:51, 7 March 2025 (UTC) |
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=====Stepper #3 (ASML DUV) - |
=====Stepper #3 (ASML DUV) - Maint Complete ===== |
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ASML Maintenance is complete, the system is up. |
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I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC. |
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// [[User:John_d|Demis D. John]] 02:18, 7 March 2025 (UTC) |
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=====RIE #5 Down: Mon March 13th ===== |
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Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair). |
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RIE #5 will be down Monday March 13th through the end of Wednesday March 15th for maintenance. |
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If we complete the job early we will send a follow-up email releasing the system. |
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Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // [[User:John_d|Demis D. John]] 00:39, 22 October 2024 (UTC) |
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=====New Gowns: Toolbelts purchases===== |
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We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase. |
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Two vendors for cleanroom belts we are using are listed here, you may request others: |
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* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist. |
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* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack] |
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// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC) |
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=====Suss SB6-8E===== |
=====Suss SB6-8E===== |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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I will send out an update once we have one. |
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-Aidan |
-Aidan |
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//[[User: |
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC) |
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=====ICP1 Down===== |
=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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=====Lab Access Changes: Symmetry App===== |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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-Physical card |
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-Mobile phone via Symmetry App |
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Latest revision as of 19:15, 11 March 2025
EBL Move-In: Tues 9-11a
Users,
Thank you for your patience while we moved the new EBL system in.
The lab is fully open for use.
Peder Lenvik
Sr. Facilities Lead // Demis D. John 23:47, 10 March 2025 (UTC)
MLA150 is UP
System will be available at 12:30 today (Fri Mar 7th). No changes to OAF settings but PAF has moved about 10 points positive for focus. We will work on adjusting PAF back to around 0 (on our cal resist) some time next week. -Lee //Demis D. John 20:51, 7 March 2025 (UTC)
Stepper #3 (ASML DUV) - Maint Complete
ASML Maintenance is complete, the system is up. // Demis D. John 02:18, 7 March 2025 (UTC)
RIE #5 Down: Mon March 13th
RIE #5 will be down Monday March 13th through the end of Wednesday March 15th for maintenance.
If we complete the job early we will send a follow-up email releasing the system.
//Vraj Mehalana 09:46, 21 February 2025 (UTC)
New Gowns: Toolbelts purchases
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
Two vendors for cleanroom belts we are using are listed here, you may request others:
- Uniform Technology Tool Belt - note the waist size, the 49” belt fits up to ~36-38” waist.
- HiTEC Fannypack
// Demis D. John 03:34, 3 January 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)