Template:Announcements

ICP #2 Scheduled Maint next Tuesday 2/4

ICP#2 will be unavailable a good chunk of the day this coming Tuesday. We will be cleaning the chamber and servicing the throttle valve as we believe it may be the source of the reaction chamber pressure errors (plus it is due for servicing).

-Lee

//Vraj Mehalana 18:54, 31 January 2025 (UTC)

YES - Scheduled Maint

I will be taking the YES down for a PM on Tuesday beginning at 8 am. Since I will be changing out the throttle valve and swapping in our original generator, this could go into Wednesday. Please plan your processing accordingly.

-Lee

//Vraj Mehalana 17:22, 23 January 2025 (UTC)

Lab is Open

All suits have been pulled and new suits have been put up. All personal items left behind can be found in the boxes in the lobby.

Please sign up for your hanger spot.

THE LAB IS NOW OPEN FOR BUSINESS

Thank you for your patience during shutdown activities. -- Peder Lenvik

// Demis D. John 03:34, 3 January 2025 (UTC)

New Gowns in Jan

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for tool belts you can use.

Two vendors for cleanroom belts we are using, you may request others:

• Uniform Technology Tool Belt - note the waist size, the 49” belt fits up to ~36-38” waist.
• HiTEC Fannypack

// Demis D. John 03:34, 3 January 2025 (UTC)

KLA P7 Profilometer: Down

The KLA remains down awaiting parts. This part order has been expedited to the extent possible and should be here in the next few days.

Thanks Bill Millerski // Demis D. John 03:30, 3 January 2025 (UTC)

Oxford ALD+Ion Mill

Unfortunately Chamber 1 is still down for our Oxford Cluster tool. However we did manage a "work around" to get Chamber 2 and Chamber 3 operational again. The software is in constant error state which does not affect processing on Chamber 2 and Chamber 3.

A new tool listing is available in sign up monkey for both these chambers with the word "temporary" or "temp". For the time being users will have to use these "new" tool listings to reserve time on Chamber 2 and Chamber 3. Users will have to go through a quick tutorial with me prior to having access to the tool in order to reserve time slots on sign up monkey. Under NO circumstances are users to use this tool prior to being signed off after being shown how to navigate the software under the current error state.

Just to reiterate: 1) The tool remains locked out in sign up monkey for the previous tool names

2) There is a new tool designation for Chamber 2 & 3 in sign up monkey"Deposition, ALD, Chamber 3 (Oxford FlexAl) Temporary""Dry Etch, Ion Mill (Oxford Flexal) Temp"

3) Users need a quick tutorial from me prior to getting tool access.

4) Users are not to run the tool until being signed off on the new procedure by staff! Any user caught using the tool without having the updated tool tutorial sign off, will be subject to suspension.

5) I will be available at any time during my regular scheduled shift to sign users off. I will be at the tool in the lab for the majority of my work day. -- Bill Millerski //Vraj Mehalana 23:40, 8 January 2025 (UTC)

Holography/PL: HeCd Laser Down Mon Dec 16th

The 325nm UV Laser will be unavailable from Mon. Dec 16th, through the christmas shutdown, and will be available again soon after Monday Jan 6th. We will be installing the refurbished laser which will have higher output power.

Holography will be unavailable during this time, but all other PL lasers will be available. // Demis D. John 03:28, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)