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=====Oxford Flexal ALD=====
The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday.


Sorry for any inconvenience this may cause.
=====Fluorine ICP: UO=====
We finally got the slit valve assemble to seal correctly after making a number of mechanical adjustments. The tool is currently running an O2 clean and should be available to use within the next 10-15 minutes. Please let us know if you encounter any issues. The load lock seems like it's taking a while to get down to 0mT but that could just be a product of being open for the past several days.


Thanks,
Thanks
Bill Millerski

//[[User:Mehalana v|Vraj Mehalana]] 21:12, 12 August 2025 (UTC)
Aidan
// [[User:John_d|Demis D. John]] 06:39, 3 April 2025 (UTC)

=====Lab Open=====
Hello All,

Following the campus-wide power shutoff,
The fab is open but the following equipment still has lingering issues:

# Unaxis ICP-PECVD - Main computer is not coming up
# ALD/CAIBE - All chambers down. Bill is still working on it.
# Fluorine Etcher - Will remain down until it can be addressed Monday.
# EB3 - Cryo regen failed, on second regen so should come up later.
# GCA Autostep - Having computer issues.
# The ALD/CABE and EB3 have a more than fair chance of coming back up today.

Bill will have those updates along with the status of the Autostep.

The Unaxis and Fluorine etcher will not be coming up until sometime next week at the earliest.

Best,
Tony Bosch
// [[User:John_d|Demis D. John]] 21:37, 28 March 2025 (UTC)

=====EVG - Scheduled downtime=====
I am looking at sending that generator on the week of the 24th or 31st. It should not take that long, but I would plan for it to be down for 3 weeks.

Please let me know if this does not work for you or if you prefer one week over the other.

-Lee
//[[User:Mehalana v|Vraj Mehalana]] 17:50, 26 March 2025 (UTC)

=====Raith Velion UP=====
Raith service have replaced the interferometer laser, and the system is pumping down overnight. I'll run calibrations and checks tomorrow and expect the Velion to be open for general use on Wednesday morning.
--Dan
//[[User:Mehalana v|Vraj Mehalana]] 22:27, 1 April 2025 (UTC)

=====New Gowns: Toolbelts purchases=====
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]

// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)


=====Suss SB6-8E=====
=====Suss SB6-8E=====
This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact [[Demis D. John]] for more information.
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
// [[User:John_d|Demis D. John]] 04:28, 5 August 2025 (UTC)

I will send out an update once we have one.
-Aidan
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)


=====ICP1 Down=====
=====ICP1 Down=====

Latest revision as of 22:24, 13 August 2025

Oxford Flexal ALD

The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday.

Sorry for any inconvenience this may cause.

Thanks Bill Millerski //Vraj Mehalana 21:12, 12 August 2025 (UTC)

Suss SB6-8E

This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact Demis D. John for more information. // Demis D. John 04:28, 5 August 2025 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)