Template:Announcements: Difference between revisions
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The service engineer had to order some more parts for the SEM. He’ll be back tomorrow to continue troubleshooting the skewing issue. In the meantime, the tool is useable and is only showing the skewing issue within the mags of 5.5k to 8.5k. Please let me know if you encounter any other issues. Thanks, Aidan |
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=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - IMPORTANT: Please Read!===== |
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We will be taking down the DSE to changeout the turbo pump next Wednesday (5/28). If all goes well the tool should only be down for the day. I’ll keep you updated with emails. |
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===== SignupMonkey + Wiki: Off-Campus Access===== |
===== SignupMonkey + Wiki: Off-Campus Access===== |
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Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website, including both the Nanofab Wiki and Signupmonkey |
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey. |
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If you are off-campus, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab: |
If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab: |
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https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn |
https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn |
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This is hopefully a temporary solution, we will implement other remedies next week. |
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-- Vraj |
-- Vraj |
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// [[User:John_d|Demis D. John]] |
// [[User:John_d|Demis D. John]] 20:08, 22 April 2025 (UTC) |
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=====Fluorine ICP: UP===== |
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We finally got the slit valve assemble to seal correctly after making a number of mechanical adjustments. The tool is currently running an O2 clean and should be available to use within the next 10-15 minutes. Please let us know if you encounter any issues. The load lock seems like it's taking a while to get down to 0mT but that could just be a product of being open for the past several days. |
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Thanks, |
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Aidan |
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// [[User:John_d|Demis D. John]] 06:39, 3 April 2025 (UTC) |
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Hello All, |
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Following the campus-wide power shutoff, |
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The fab is open but the following equipment still has lingering issues: |
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# Unaxis ICP-PECVD - Main computer is not coming up |
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# ALD/CAIBE - All chambers down. Bill is still working on it. |
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# Fluorine Etcher - Will remain down until it can be addressed Monday. |
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# EB3 - Cryo regen failed, on second regen so should come up later. |
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# GCA Autostep - Having computer issues. |
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# The ALD/CABE and EB3 have a more than fair chance of coming back up today. |
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Bill will have those updates along with the status of the Autostep. |
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The Unaxis and Fluorine etcher will not be coming up until sometime next week at the earliest. |
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Best, |
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Tony Bosch |
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=====EVG - Scheduled downtime===== |
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I am looking at sending that generator on the week of the 24th or 31st. It should not take that long, but I would plan for it to be down for 3 weeks. |
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Please let me know if this does not work for you or if you prefer one week over the other. |
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-Lee |
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=====Raith Velion UP===== |
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Raith service have replaced the interferometer laser, and the system is pumping down overnight. I'll run calibrations and checks tomorrow and expect the Velion to be open for general use on Wednesday morning. |
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--Dan |
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//[[User:Mehalana v|Vraj Mehalana]] 22:27, 1 April 2025 (UTC) |
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=====New Gowns: Toolbelts purchases===== |
=====New Gowns: Toolbelts purchases===== |
Latest revision as of 22:24, 28 May 2025
SEM#1 update
The service engineer had to order some more parts for the SEM. He’ll be back tomorrow to continue troubleshooting the skewing issue. In the meantime, the tool is useable and is only showing the skewing issue within the mags of 5.5k to 8.5k. Please let me know if you encounter any other issues. Thanks, Aidan // Demis D. John 21:49, 28 May 2025 (UTC)
Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - IMPORTANT: Please Read!
We will be taking down the DSE to changeout the turbo pump next Wednesday (5/28). If all goes well the tool should only be down for the day. I’ll keep you updated with emails. // Vraj Mehalana 21:48, 21 May 2025 (UTC)
SignupMonkey + Wiki: Off-Campus Access
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.
If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
-- Vraj // Demis D. John 20:08, 22 April 2025 (UTC)
New Gowns: Toolbelts purchases
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
Two vendors for cleanroom belts we are using are listed here, you may request others:
- Uniform Technology Tool Belt - note the waist size, the 49” belt fits up to ~36-38” waist.
- HiTEC Fannypack
// Demis D. John 03:34, 3 January 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)