Template:LithRecipe Table: Difference between revisions
Jump to navigation
Jump to search
No edit summary |
(correct Maskless aligner link) |
||
| (11 intermediate revisions by 3 users not shown) | |||
| Line 1: | Line 1: | ||
| width=" |
<includeonly>| width="100" bgcolor="#DAF1FF" | [[Contact_Alignment_Recipes#Suss Aligners (SUSS MJB-3)|SUSS MJB-3]] |
||
| width=" |
| width="100" bgcolor="#DAF1FF" | [[Contact_Alignment_Recipes#Contact Aligner (SUSS MA-6)|SUSS MA-6]] |
||
| width=" |
| width="100" bgcolor="#DAF1FF" | [[Stepper Recipes#Stepper 1 (GCA 6300)|Stepper 1<br>(GCA 6300)]] |
||
| width=" |
| width="100" bgcolor="#DAF1FF" | [[Stepper Recipes#Stepper 2 (AutoStep 200)|Stepper 2<br>(AutoStep 200)]] |
||
| width=" |
| width="100" bgcolor="#DAF1FF" | [[Stepper Recipes#Stepper 3 (ASML DUV)|Stepper 3<br>(ASML DUV)]] |
||
| width=" |
| width="100" bgcolor="#DAF1FF" | [[Maskless Aligner Recipes|MLA150<br>(Heidelberg)]]</includeonly> |
||
<noinclude> |
|||
| width="65" bgcolor="#DAF1FF" | [[FEI Sirion]] |
|||
| width="65" bgcolor="#DAF1FF" | [[JEOL 6300]] |
|||
{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" border="1" |
|||
|- {{LithRecipe Table}} |
|||
|} |
|||
<hr> |
|||
[[category:Templates]] |
|||
Used on the '''[https://wiki.nanotech.ucsb.edu/wiki/Lithography_Recipes#Photolithography_Recipes Lithography Recipes page]''' to repeat the Table header multiple times. |
|||
Latest revision as of 06:25, 14 September 2020
| SUSS MA-6 | Stepper 1 (GCA 6300) |
Stepper 2 (AutoStep 200) |
Stepper 3 (ASML DUV) |
MLA150 (Heidelberg) |
Used on the Lithography Recipes page to repeat the Table header multiple times.