Other Dry Etching Recipes: Difference between revisions
Jump to navigation
Jump to search
No edit summary |
No edit summary |
||
| Line 7: | Line 7: | ||
*[[media:26-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-b.pdf|SiO<sub>2</sub> Etch Recipe 2]] |
*[[media:26-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-b.pdf|SiO<sub>2</sub> Etch Recipe 2]] |
||
=[[CAIBE (Oxford )]]= |
=[[CAIBE (Oxford Ion Mill)]]= |
||