RIE Etching Recipes: Difference between revisions

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=[[RIE 3 (MRC)]] =
=[[RIE 3 (MRC)]] =
==SiO<sub>2</sub> Etching (RIE 3)==
*[[media:|SiO<sub>2</sub> Etch Recipe - CHF<sub>3]]


=[[RIE 5 (PlasmaTherm)]] =
=[[RIE 5 (PlasmaTherm)]] =

Revision as of 18:06, 29 July 2016

Back to Dry Etching Recipes.

RIE 1 (Custom)

RIE 2 (MRC)

CdZnTe Etching (RIE 2)

ZnS Etching (RIE 2)

ITO Etching (RIE 2)

InP-InGaAsP-InGaAlAs Etching (RIE 2)

RIE 3 (MRC)

SiO2 Etching (RIE 3)

  • [[media:|SiO2 Etch Recipe - CHF3]]

RIE 5 (PlasmaTherm)

AlGaAs\GaAs Etching (RIE 5)

GaN Etching (RIE 5)

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