RIE Etching Recipes: Difference between revisions
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=[[RIE 3 (MRC)]] = |
=[[RIE 3 (MRC)]] = |
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==SiO<sub>2</sub> Etching (RIE 3)== |
==SiO<sub>2</sub> Etching (RIE 3)== |
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*[[media: |
*[[media:|SiO<sub>2</sub> Etch Recipe with a very low surface damage - CHF<sub>3]] |
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=[[RIE 5 (PlasmaTherm)]] = |
=[[RIE 5 (PlasmaTherm)]] = |
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Revision as of 18:33, 2 August 2016
Back to Dry Etching Recipes.
RIE 1 (Custom)
RIE 2 (MRC)
CdZnTe Etching (RIE 2)
ZnS Etching (RIE 2)
ITO Etching (RIE 2)
InP-InGaAsP-InGaAlAs Etching (RIE 2)
RIE 3 (MRC)
SiO2 Etching (RIE 3)
- [[media:|SiO2 Etch Recipe with a very low surface damage - CHF3]]