Template:Recipe: Difference between revisions
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<noinclude>The recipe shown here is just a placeholder - please replace this info with your own. This text won't show up in the final page.</noinclude> |
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==Recipe== |
==Recipe== |
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<includeonly>[[category:Recipes]]</includeonly> |
<includeonly>[[category:Recipes]]</includeonly> |
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;Recipe Name |
;Recipe Name |
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: SiOVert_MadeUp |
: SiOVert_MadeUp |
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;Tool |
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: Panasonic ICP #2 |
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;Description |
;Description |
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Revision as of 21:53, 3 August 2017
The recipe shown here is just a placeholder - please replace this info with your own. This text won't show up in the final page.
Recipe
- Recipe Name
- SiOVert_MadeUp
- Tool
- Panasonic ICP #2
- Description
- This recipe is made up, and deposits glass with lots of holes in it.
- Recipe Parameters
- Ar = 20 sccm
- O2 = 10 sccm
- Pressure = 50 mT
- RF = 200 W
- Temperature = 200°C
- Dep Rate
- 200 nm/min or 12,000 nm/sec
- Notes
- Make sure sample is inside out before loading into tool.
- This recipe usually doesn't work.
- Film will etch in HF
Characterization
