Template:Announcements: Difference between revisions
Jump to navigation
Jump to search
Content deleted Content added
m →JEOL SEM #2: Down: sigfix |
icp1 dpwn, delete ASML |
||
| Line 17: | Line 17: | ||
// [[User:John d|Posted: ]] 09:58, 4 January 2018 (PST) |
// [[User:John d|Posted: ]] 09:58, 4 January 2018 (PST) |
||
===== |
===== ICP#1: Down ===== |
||
There is a problem with the backside He cooling. |
|||
| ⚫ | |||
[[User:John d|John d]] ([[User talk:John d|talk]]) 13:41, 14 February 2018 (PST) |
|||
| ⚫ | |||
ASML Stepper #3 periodic maintenance is complete. System is ready for use. |
|||
| ⚫ | |||
===== JEOL SEM #2: Down ===== |
===== JEOL SEM #2: Down ===== |
||
Load Lock problem. |
Load Lock problem. |
||
// [[User:John d|Posted:]] 13:40, 14 February 2018 (PST) |
// [[User:John d|Posted:]] 13:40, 14 February 2018 (PST) |
||
| ⚫ | |||
| ⚫ | |||
| ⚫ | |||
===== Cary 500 Down ===== |
===== Cary 500 Down ===== |
||
Revision as of 21:41, 14 February 2018
UCSB NanoFab Announcements
Announcements
There are no general announcements at this time. // Posted: 09:58, 4 January 2018 (PST)
ICP#1: Down
There is a problem with the backside He cooling. John d (talk) 13:41, 14 February 2018 (PST)
JEOL SEM #2: Down
Load Lock problem. // Posted: 13:40, 14 February 2018 (PST)
Gasonics: Up
The process chamber mechanical pump is struggling to make base pressure but the system is able to successfully run. We are waiting for the replacement pump to repaired and returned. // Posted: 10:14, 12 February 2018 (PST)
Cary 500 Down
UV-Vis Detector Failure. Tool is able to used from 600nm and up. Looking into replacement options. // Posted: 13:47, 12 February 2018 (PST)