UV Ozone Reactor: Difference between revisions

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= About =
== About ==


== Operating Procedures ==
== Operating Procedures ==
[[UV Ozone Quick Start|Quick Start]]
* [[UV Ozone Quick Start|Quick Start]]
[[Media:UV Ozone Manual Jelight M-144AX.pdf]]
* [Media:UV Ozone Manual Jelight M-144AX.pdf]

Revision as of 22:53, 17 July 2018

UV Ozone Reactor
Tool Type Dry Etch
Location Bay 5
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description ?
Manufacturer ?
Dry Etch Recipes


About

Operating Procedures

  • Quick Start
  • [Media:UV Ozone Manual Jelight M-144AX.pdf]
Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=UV_Ozone_Reactor&oldid=155295"