UV Ozone Reactor: Difference between revisions
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|type = Dry Etch |
|type = Dry Etch |
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|super= Tony Bosch |
|super= Tony Bosch |
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|model=M-144AX |
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|location=Bay 5 |
|location=Bay 5 |
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|description = |
|description = UV Ozone Reactor |
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|manufacturer = |
|manufacturer = Jelight |
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}} |
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== About == |
== About == |
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The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment. |
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== Operating Procedures == |
== Operating Procedures == |
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* [[UV Ozone Quick Start|Quick Start]] |
* [[UV Ozone Quick Start|Quick Start]] |
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* [Media:UV Ozone Manual Jelight M-144AX.pdf] |
* [[Media:UV Ozone Manual Jelight M-144AX.pdf|UV Ozone Manual]] |
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Revision as of 22:57, 17 July 2018
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About
The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.