Template:Announcements: Difference between revisions
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===== RIE#5: Software Upgrades ===== |
===== RIE#5: Software Upgrades ===== |
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[[RIE_5_(PlasmaTherm)|RIE#5]] System has a leak - down until further notice. |
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[[RIE_5_(PlasmaTherm)|RIE#5]] Will be down next week from approximately Monday Sept. 17th to Thursday Sept. 20th, for a software upgrade to the same software running on the other PlasmaTherm tools. |
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All users will need to be retrained |
All users will need to be retrained to use the new Cortex software. |
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// [[User: |
// [[User:Thibeault|Thibeault]] 16:40, 26 September 2018 (PDT) |
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===== PECVD#1: Software Upgrade ===== |
===== PECVD#1: Software Upgrade ===== |
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Software upgrade in progress. After the upgrade is complete, everyone must be re-certified to use the tool. Please document any custom recipes that you may have, in case they can't be copied over. |
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// [[User: |
// [[User:Thibeault|Thibeault]] 16:40, 26 September 2018 (PDT) |
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===== CARY500 - Down - Decomissioned ===== |
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CARY 500 Spectrophotometer has failed - Will not be repaired - being decomissioned. New Filmetrics F10-RT-UVX being ordered as a replacement. |
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===== RIE#5: SiCl4 Issue ===== |
===== RIE#5: SiCl4 Issue ===== |
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// [[User:John d|John d]] 17:22, 15 June 2018 (PDT) |
// [[User:John d|John d]] 17:22, 15 June 2018 (PDT) |
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===== RIE#3: RF Issue ===== |
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RF issues on RIE3 resolved. System is up. See email from tool owner for details. |
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===== Sputter#4: TiW gun shorted ===== |
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Gun will be looked at during next opening this Friday 9/21. |
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// [[User:Thibeault|Thibeault]] 08:31, 18 September 2018 (PDT) |
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<!---------- end of announcements ------------> |
<!---------- end of announcements ------------> |
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Revision as of 23:40, 26 September 2018
UCSB NanoFab Announcements
Gasonics Up
RIE#5: Software Upgrades
RIE#5 System has a leak - down until further notice. All users will need to be retrained to use the new Cortex software. // Thibeault 16:40, 26 September 2018 (PDT)
PECVD#1: Software Upgrade
Software upgrade in progress. After the upgrade is complete, everyone must be re-certified to use the tool. Please document any custom recipes that you may have, in case they can't be copied over. // Thibeault 16:40, 26 September 2018 (PDT)
CARY500 - Down - Decomissioned
CARY 500 Spectrophotometer has failed - Will not be repaired - being decomissioned. New Filmetrics F10-RT-UVX being ordered as a replacement. // Thibeault 16:40, 26 September 2018 (PDT)
RIE#5: SiCl4 Issue
We have a flow rate problem on the SiCl4 gas line. You can only flow the SiCl4 for 5 minutes and then you have to wait 5 minutes before you flow it again. So in order to to do a 10 minute Etch you will have to do it in three steps flow 5 mi, wait 5mi, then flow 5min. // John d 17:22, 15 June 2018 (PDT)