Oven 4 (Thermo-Fisher HeraTherm): Difference between revisions
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|picture=Oven4.jpg |
|picture=Oven4.jpg |
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|type = Lithography |
|type = Lithography |
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|super= |
|super= Brian Lingg |
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|location=Bay 6 |
|location=Bay 6 |
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|description = Programmable Oven |
|description = Programmable Oven |
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Revision as of 17:18, 15 April 2020
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About
This oven is often used for long thermal cures and wafer bonding. It has programmable temperature ramps and hold times, but the ramp rate is only "low/med./high" (not an exact ramp rate). A manual needle valve for nitrogen purge has been installed on the back of the oven.
Specifications
- Maximum Temperature = 330 C (no active cooling)
- Gases: N2, manually set with needle valve (not programmable)
- Multi-step programmable temperature ramps
- Programmable atmospheric purge (for cooling)
Documentation
| To Do: User Manual |