Template:Announcements: Difference between revisions
Jump to navigation
Jump to search
(→ASML is DOWN: light bulb update) |
(→ASML is DOWN: level sensor update) |
||
| Line 15: | Line 15: | ||
===== ASML is DOWN ===== |
===== ASML is DOWN ===== |
||
Level sensor failed |
Level sensor failed. ASML support staff is unavailable until Jan 2nd due to vacations. Will work on it as soon as we get info from ASML. |
||
// [[User:John d|John d]] 10: |
// [[User:John d|John d]] 10:54, 30 December 2019 (PST) |
||
===== Unaxis ICP-PECVD ===== |
===== Unaxis ICP-PECVD ===== |
||
Revision as of 18:54, 30 December 2019
Equipment Status
Nanofab is OPEN
The cleanroom is now open. // John d 08:50, 28 December 2019 (PST)
ASML is DOWN
Level sensor failed. ASML support staff is unavailable until Jan 2nd due to vacations. Will work on it as soon as we get info from ASML. // John d 10:54, 30 December 2019 (PST)
Unaxis ICP-PECVD
The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)
Suss Bonder
Suss Bonder is DOWN. The vendor is struggling to get the software and hardware upgrades to work. We have a meeting next week, 10/28/19, to discuss options. Silva 11:16, 25 October 2019 (PDT)