Template:Announcements: Difference between revisions
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[[User:Silva|Silva]] 08:15, 16 January 2020 (PST) |
[[User:Silva|Silva]] 08:15, 16 January 2020 (PST) |
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===== ASML |
===== MOVED: ASML Maintenance: March 30th ===== |
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Accommodating user requests, we have moved the periodic maintenance to Monday March 30th. The PM will still be on the order of 1.5 weeks at that time. Please let me know if you have any questions or see any calibration drifts in the mean time. |
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Laser Gas Fill enabled. System calibrated, ready for use. |
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// [[User:John d|John d]] |
// [[User:John d|John d]] 16:25, 16 January 2020 (PST) |
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===== ASML Maintenance: Feb 10th - 19th ===== |
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System will be unavailable from Monday Feb 10th to Wednesday Feb 19th. |
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May be able to open up the system earlier depending on how the work goes. |
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// [[User:John d|John d]] 16:03, 14 January 2020 (PST) |
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===== Unaxis ICP-PECVD ===== |
===== Unaxis ICP-PECVD ===== |
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Revision as of 00:25, 17 January 2020
Equipment Status
GCA Autosetp Maintenance
The system will be down for service Monday January 20, 2020 until late afternoon Wednesday January 22nd. Silva 08:14, 16 January 2020 (PST)
GCA 6300 Maintenance
The system will be down for service Thursday January 23, 2020 until late afternoon. Silva 08:15, 16 January 2020 (PST)
MOVED: ASML Maintenance: March 30th
Accommodating user requests, we have moved the periodic maintenance to Monday March 30th. The PM will still be on the order of 1.5 weeks at that time. Please let me know if you have any questions or see any calibration drifts in the mean time. // John d 16:25, 16 January 2020 (PST)
Unaxis ICP-PECVD
The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)
Suss Bonder
Suss Bonder is DOWN. The vendor is struggling to get the software and hardware upgrades to work. We have a meeting next week, 10/28/19, to discuss options. Silva 11:16, 25 October 2019 (PDT)