Template:Announcements: Difference between revisions
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===== New Tool Installations ===== |
===== New Tool Installations ===== |
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See the [https://wiki.nanotech.ucsb.edu/w/index.php/Main_Page#mp-trivia-h2 News Feed] for info on two upcoming tool installations! We have a [https://www.raith.com/products/velion.html?mobile=0 Raith Velion FIB] and a [https://heidelberg-instruments.com/en/products/mla150.html Heidelberg MLA150 Maskless Aligner] on the way. |
See the [https://wiki.nanotech.ucsb.edu/w/index.php/Main_Page#mp-trivia-h2 News Feed] for info on two upcoming tool installations! We have a [https://www.raith.com/products/velion.html?mobile=0 Raith Velion FIB] and a [https://heidelberg-instruments.com/en/products/mla150.html Heidelberg MLA150 Maskless Aligner] on the way. |
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// [[User:John d|John d]] 17:48, 2 June 2020 (PDT) |
// [[User:John d|John d]] 17:48, 2 June 2020 (PDT) |
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===== Unaxis ICP-PECVD ===== |
===== Unaxis ICP-PECVD ===== |
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The ICP-PECVD module is available upon request. Contact Tony Bosch if interested. System is using deuterated Silane for low loss optical films use only. |
The ICP-PECVD module is available upon request. Contact Tony Bosch if interested. System is using deuterated Silane for low loss optical films use only. |
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//[[User:Thibeault|Thibeault]] 14:22, 26 March 2020 (PDT) |
// [[User:Thibeault|Thibeault]] 14:22, 26 March 2020 (PDT) |
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<!---------- end of Equipment Status ------------> |
<!---------- end of Equipment Status ------------> |
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Revision as of 02:18, 9 June 2020
Equipment Status
NanoFab COVID Response
Following guidelines provided by our Office of Research, the UCSB Nanofabrication Facility is open only for limited/authorized use for critical activity at this time.
Contact the Lab Director for more information.
// John d 19:17, 8 June 2020 (PDT)
New Tool Installations
See the News Feed for info on two upcoming tool installations! We have a Raith Velion FIB and a Heidelberg MLA150 Maskless Aligner on the way.
// John d 17:48, 2 June 2020 (PDT)
Unaxis ICP-PECVD
The ICP-PECVD module is available upon request. Contact Tony Bosch if interested. System is using deuterated Silane for low loss optical films use only.
// Thibeault 14:22, 26 March 2020 (PDT)