High Temp Oven (Blue M): Difference between revisions

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|manufacturer = Blue M Electric
|manufacturer = Blue M Electric
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}}The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.
The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.


Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.

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== Operating Procedures ==


[https://wiki.nanotech.ucsb.edu/w/images/6/6c/BlueM_Instructions.pdf BlueM Oven Instructions]

Latest revision as of 17:33, 8 September 2022

High Temp Oven (Blue M)
BlueMOven.jpg
Location Bay 5
Tool Type Lithography
Manufacturer Blue M Electric
Description High Temperature Oven
Primary Supervisor Michael Barreraz
(805) 893-4147
mikebarreraz@ece.ucsb.edu

Secondary Supervisor

Aidan Hopkins

Recipes
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The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.

Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.


Operating Procedures

BlueM Oven Instructions

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