High Temp Oven (Blue M)

High Temp Oven (Blue M) Location Bay 5 Tool Type Lithography Manufacturer Blue M Electric Description High Temperature Oven Primary Supervisor Michael Barreraz (805) 893-4147 mikebarreraz@ece.ucsb.edu Secondary Supervisor Aidan Hopkins Recipes SignupMonkey: Sign up for this tool

The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.

Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.

Operating Procedures

BlueM Oven Instructions