High Temp Oven (Blue M)

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High Temp Oven (Blue M)
Location Bay 5
Tool Type Lithography
Manufacturer Blue M Electric
Description High Temperature Oven

Primary Supervisor Michael Barreraz
(805) 893-4147

Secondary Supervisor

Aidan Hopkins

Recipes N/A

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The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.

Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.

Operating Procedures

BlueM Oven Instructions