Template:Announcements: Difference between revisions
(EB2 heater down) |
(corrected EB3 --> EB2, AUtostep down RMS) |
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// [[User:John d|John d]] 14:27, 21 September 2022 (PDT) |
// [[User:John d|John d]] 14:27, 21 September 2022 (PDT) |
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===== Stepper #2 (Autostep): Down ===== |
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The tool remains down while we work with the vendor to resolve the issue with the reticle handler. |
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// [[User:John d|John d]] 07:34, 22 September 2022 (PDT) |
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===== E-Beam#2: Heater Down ===== |
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EB2 Heated Processing is down |
EB2 Heated Processing is down |
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// [[User:John d|John d]] 15:40, 21 September 2022 (PDT) |
// [[User:John d|John d]] 15:40, 21 September 2022 (PDT) |
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Revision as of 14:34, 22 September 2022
Important Announcements
SEM#1 (FEI): UP
The field service engineer has finished with the alignments and the system is ready to use. // John d 14:27, 21 September 2022 (PDT)
Stepper #2 (Autostep): Down
The tool remains down while we work with the vendor to resolve the issue with the reticle handler. // John d 07:34, 22 September 2022 (PDT)
E-Beam#2: Heater Down
EB2 Heated Processing is down // John d 15:40, 21 September 2022 (PDT)
GCA AutoStep Service
Stepper #2 (GCA AutoStep200) will be unavailable for use while maintenance tasks are performed on the following dates: 9-26-22 8am to 9-27-22 5pm.
// John d 08:30, 19 September 2022 (PDT)
GCA 6300 Service
GCA 6300 will not be available for use while it is undergoing maintenance activities on 9-28-22 & 9-29-22.
// John d 08:33, 19 September 2022 (PDT)
MLA 150 Service & Software Revision
The MLA will be down beginning the evening of Monday October 3rd and should be back up sometime Friday October 7th. // L Sawyer 13:32, 31 August 2022 (PDT)
ASML Up; Network status
Nanofiles sync & JobCreator functionality is in the process of being restored. Batch_Reports are now syncing. JobCreator is working but local scripts are still being written + tested.
// John d 01:53, 17 September 2022 (PDT)