Template:Announcements: Difference between revisions
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===== E-Beam #5: Down ===== |
===== E-Beam #5: Down ===== |
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Chuck rotation motor damaged. |
Chuck rotation motor damaged. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:38, 13 March 2023 (PDT) |
// [[User:Mehalana v|Vraj Mehalana]] 14:38, 13 March 2023 (PDT) |
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===== ICP #1: Down ===== |
===== ICP #1: Down ===== |
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One of the dry pumps is not getting power from the tool. We have located part of the problem but need to contact Panasonic for some guidance. Since tech support is in Japan, response time will be impacted. -- Lee Sawyer |
One of the dry pumps is not getting power from the tool. We have located part of the problem but need to contact Panasonic for some guidance. Since tech support is in Japan, response time will be impacted. -- Lee Sawyer |
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//[[User:Mehalana v|Vraj Mehalana]] 12:36, 13 March 2023 (PDT) |
// [[User:Mehalana v|Vraj Mehalana]] 12:36, 13 March 2023 (PDT) |
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===== Unaxis Etch: Down ===== |
===== Unaxis Etch: Down ===== |
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Revision as of 22:25, 13 March 2023
Important Announcements
E-Beam #5: Down
Chuck rotation motor damaged. // Vraj Mehalana 14:38, 13 March 2023 (PDT)
ICP #1: Down
One of the dry pumps is not getting power from the tool. We have located part of the problem but need to contact Panasonic for some guidance. Since tech support is in Japan, response time will be impacted. -- Lee Sawyer // Vraj Mehalana 12:36, 13 March 2023 (PDT)
Unaxis Etch: Down
We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony // John d 09:35, 13 February 2023 (PST)
Dektak XT ready for training
We have replaced the Dektak 6M with a new Dektak XT profilometer. The system is available for training, please contact the tool supervisor. // John d 10:08, 7 February 2023 (PST)
Au Plating: DOWN
Bath damaged, system is down for repair. // John d 08:48, 27 October 2022 (PDT)