Template:Announcements: Difference between revisions
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=====E-Beam #4 (CHA) - EB4 is down===== |
=====E-Beam #4 (CHA) - EB4 is down===== |
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We need to replace a part on the source shutter. We should have it on Monday. I'll update when the tool is available. |
We need to replace a part on the source shutter. We should have it on Monday. I'll update when the tool is available. |
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Revision as of 01:00, 3 May 2023
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E-Beam #4 (CHA) - EB4 is down
We need to replace a part on the source shutter. We should have it on Monday. I'll update when the tool is available. //Vraj Mehalana 15:26, 28 April 2023 (PDT)
Wafer Coater (S Cubed Flexi) - S3 field service
S3 will be on-site looking into our hand 2 issues on Wednesday May 3rd and 4th. They will be confirming Monday so there is a chance those days get shifted. Please plan your processing accordingly as the system will not be available while they are here looking into the problem. //Vraj Mehalana 13:54, 28 April 2023 (PDT)
FEI SEM#1 Replacement Project
The FEI SEM #1 will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. //Vraj Mehalana 10:55, 16 March 2023 (PDT)
Unaxis Etch: Down
We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony // John d 09:35, 13 February 2023 (PST)
Au Plating: UP
only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues. // Vraj Mehalana 12:35, 15 March 2023 (PDT)