Template:Announcements: Difference between revisions
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=====Unaxis ICP-PECVD is DOWN===== |
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I removed the wafer that was stuck in the process chamber. Once again it was user error. You MUST remove ALL of the resist from the outer 5-7mm of your wafer when processing with 100mm substrates. |
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Sadly the system is still down. I looked into the RF1 tuning issues and it looks as though it has failed completely. I tried replacing the AMT controller but the failure mode didn't change. I did notice that when I placed the AMT controller in Manual and tried to drive the caps the matching network was unresponsive. It looks like the matching network may need to be replaced.- |
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Tony |
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//[[User:Mehalana v|Vraj Mehalana]] 09:25, 30 May 2023 (PDT) |
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=====IBD UP===== |
=====IBD UP===== |
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We received the new Xe bottle, and it was installed, leak checked, and tested without issue. |
We received the new Xe bottle, and it was installed, leak checked, and tested without issue. |
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Revision as of 16:25, 30 May 2023
Unaxis ICP-PECVD is DOWN
I removed the wafer that was stuck in the process chamber. Once again it was user error. You MUST remove ALL of the resist from the outer 5-7mm of your wafer when processing with 100mm substrates.
Sadly the system is still down. I looked into the RF1 tuning issues and it looks as though it has failed completely. I tried replacing the AMT controller but the failure mode didn't change. I did notice that when I placed the AMT controller in Manual and tried to drive the caps the matching network was unresponsive. It looks like the matching network may need to be replaced.-
Tony //Vraj Mehalana 09:25, 30 May 2023 (PDT)
IBD UP
We received the new Xe bottle, and it was installed, leak checked, and tested without issue. IBD is back up and available for use. I apologize for any inconvenience. //Vraj Mehalana 12:20, 25 May 2023 (PDT)
Plasma Activation (EVG 810)
We have received almost all the replacement parts for the tool except the new chuck. The original delivery date of mid June has now been pushed out to early September and they have stated that this is the best that their supplier can do. I will not be installing any new parts on the tool until we have everything. Runs will still require Staff supervision until then. //Vraj Mehalana 18:01, 2 May 2023 (PDT)