Template:Announcements: Difference between revisions
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//[[User:Mehalana v|Vraj Mehalana]] 10:13, 6 September 2023 (PDT) |
//[[User:Mehalana v|Vraj Mehalana]] 10:13, 6 September 2023 (PDT) |
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=====EVG is |
===== EVG is down===== |
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I went to check the tool out this morning and found it was not pumping down properly. After further inspection of the tool I found that the lid's quartz liner has cracked. Contacting EVG but the tool will probably be down for some time. I will updated everyone once I have an estimated down time. |
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The work on the tool has been completed and it is available for use without Staff supervision. We made 30 runs on the tool without any high reflected power issues, but the possibility still remains that it could happen. System available for use. |
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//[[User:Mehalana v|Vraj Mehalana]] |
//[[User:Mehalana v|Vraj Mehalana]] 11:39, 25 September 2023 (PDT) |
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Revision as of 18:39, 25 September 2023
Unaxis ICP-PECVD is DOWN
RF1 continues to be a problem. I will start the process of elimination from a hardware point of view Monday. Once I resolve the hardware issue our Process group will be exclusively running the system for about a week. During this time we will NOT be allowing anyone else to use the system. Sorry for the inconvenience. //Vraj Mehalana 14:17, 22 September 2023 (PDT)
Wafer Bonder, (Suss SB6-8E)
The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update.
//Vraj Mehalana 09:59, 20 September 2023 (PDT)
Dicing Saw (ADT) Upgrade 10/9
The dicing saw is scheduled go down for an upgrade on Monday October 9th and will be down for that week and into the weekend. Part of the upgrade will be updated software and will require users to be re-trained. I will provide more info on the re-training once I get a little hands on time with the updated software. I'll send out a couple of reminder emails between now and then and keep everyone updated in the event the schedule for this changes. //Vraj Mehalana 10:33, 6 September 2023 (PDT)
Stepper #1 (GCA 6300) Scheduled Maintenance
The tool has been scheduled for maintenance on 9-28-23 from 8:00am to 5:00pm. During this time the tool will be unavailable for use. Please plan your lab activities accordingly. //Vraj Mehalana 10:13, 6 September 2023 (PDT)
EVG is down
I went to check the tool out this morning and found it was not pumping down properly. After further inspection of the tool I found that the lid's quartz liner has cracked. Contacting EVG but the tool will probably be down for some time. I will updated everyone once I have an estimated down time. //Vraj Mehalana 11:39, 25 September 2023 (PDT)