Template:Announcements

PECVD2: maintenance on Monday Oct 23

We will be taking the system back down on Monday to evaluate the hoist.

//Vraj Mehalana 08:03, 20 October 2023 (PDT)

ProbeStation scheduled IT maintenance

The ProbeStation will be undergoing IT maintenance and will be unavailable on the following dates :

• 10-30-23
• 10-31-23

Please plan your work activities accordingly. //Vraj Mehalana 11:58, 17 October 2023 (PDT)

PECVD2 Planned Down Time for Maintenance 10-19-23

PECVD2 will be going down on Thursday October 19th for replacement of the hoist. This will be an all day event starting at 8:00am. Please plan accordingly. This was originally planned for 10-2, but we had to reschedule due to other equipment down

//Vraj Mehalana 15:18, 12 October 2023 (PDT)

Raith Velion - Tool Up

The y-axis motor has been replaced and the stage is working well now. Tests overnight have been completed with excellent results. I'll check the source and column alignment this morning, the tool will be available from 10am.

- Dan

//Vraj Mehalana 10:12, 13 October 2023 (PDT)

Unaxis ICP-PECVD is UP for Non-GapFill

Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available. Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run. Please plan your process accordingly. Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed.

//Vraj Mehalana 09:55, 11 October 2023 (PDT)

Wafer Bonder, (Suss SB6-8E)

The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update.

//Vraj Mehalana 09:59, 20 September 2023 (PDT)

Dicing Saw Upgrade - Update

The upgrade work on the saw is completed. My plan is to work on updating the SOP and running some more tests tomorrow and Monday. If all goes smoothly I should be ready to start re-training users on Tuesday, so I should be sending out an email some time Monday in regard to the re-training schedule.

-Lee

//Vraj Mehalana 13:25, 3 October 2023 (PDT)

Stepper #1 (GCA 6300) Scheduled Maintenance

The scheduled maintenance activates on 9-28-23 have been cancelled and will be rescheduled at a later date. The tool is now available to be reserved for use on that date.

//Vraj Mehalana 10:29, 26 September 2023 (PDT)

Stepper #2 (GCA Autostep 200) - Scheduled Maintenance

The Autostep 200 will be undergoing maintenance and will be unavailable on the following dates and times: (1) 09-30-23 8:00am-5:00pm (2) 10-01-23 8:00am-5:00pm (3) 10-02-23 8:00am-12:00pm Please plan your work activities accordingly.

//Vraj Mehalana 13:49, 27 September 2023 (PDT)

EVG is down

EVG finally has our PO. They are scheduled to be here next week, my guess would be Tuesday.

-Lee

//Vraj Mehalana 10:37, 18 October 2023 (PDT)