Decomissioned Tools: Difference between revisions
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*[[ICP-Etch (Unaxis VLR)]] |
*[[ICP-Etch (Unaxis VLR)]] |
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*[[Silicon Deep Etcher (Plasma-Therm SLR)]] |
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==Wet Processing== |
==Wet Processing== |
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Latest revision as of 23:03, 6 August 2024
This is a list of tools that are No Longer Available, but the data may be useful for recipes or other utility and are listed here only for informational purposes.
Tool recipes can often be found linked on the bottom of the tool's page.
These pages are not guaranteed to be kept available and may be removed at any time.
Web Admins - when you move a tool here, please copy/paste the Recipes wikicode into the bottom of the tool page.
Lithography
Vacuum Deposition
Dry Etching
Wet Processing
Thermal Processing
Packaging