Template:Announcements: Difference between revisions
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// [[User:John_d|Demis D. John]] 15:52, 6 August 2024 (PDT) |
// [[User:John_d|Demis D. John]] 15:52, 6 August 2024 (PDT) |
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=====Unaxis ICP-PECVD |
=====Unaxis ICP-PECVD is UP ===== |
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Bill removed the broken wafer from the process chamber and cleaned the clamp. We ran a post dep clean with no errors. System is ready to use. --Lee |
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Unfortunately the shipment of repaired parts was significantly delayed. I will be installing them and testing on Tuesday. With any luck the system will be available Tuesday evening. |
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Tony |
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=====ICP1 Down===== |
=====ICP1 Down===== |
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Revision as of 22:32, 15 August 2024
JEOL JBX-6300FS: Up
System is up and running reliably.// Demis D. John 09:07, 15 August 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
A third party bonder repair company will be out here the week of the 26th. The goal is to install the new top heater and then to do a full PM. If all goes well the tool will be available to use late that week. I’ll send out another email once I have more information. Thanks, Aidan.
// Demis D. John 15:52, 6 August 2024 (PDT)
Unaxis ICP-PECVD is UP
Bill removed the broken wafer from the process chamber and cleaned the clamp. We ran a post dep clean with no errors. System is ready to use. --Lee // Demis D. John 15:32, 15 August 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)