Template:Announcements: Difference between revisions
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=====YES EcoClean: 3kW only===== |
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I swapped out the RF generator and the tool is working again. I am getting repeated CCP warnings for the 0.7kW recipes so we will need to look into that further. |
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Bill removed the broken wafer from the process chamber and cleaned the clamp. We ran a post dep clean with no errors. System is ready to use. --Lee |
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System is up for 3kW recipes only. |
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=====JEOL JBX-6300FS: Up===== |
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System is up and running reliably.// [[User:John_d|Demis D. John]] 09:07, 15 August 2024 (PDT) |
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DO NOT run 0.7kW recipes until further notice!! |
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=====Wafer Bonder, (Suss SB6-8E)===== |
=====Wafer Bonder, (Suss SB6-8E)===== |
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Revision as of 18:31, 23 August 2024
YES EcoClean: 3kW only
I swapped out the RF generator and the tool is working again. I am getting repeated CCP warnings for the 0.7kW recipes so we will need to look into that further.
System is up for 3kW recipes only.
DO NOT run 0.7kW recipes until further notice!!
-- Lee Sawyer//Demis D. John 11:31, 23 August 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
A third party bonder repair company will be out here the week of the 26th. The goal is to install the new top heater and then to do a full PM. If all goes well the tool will be available to use late that week. I’ll send out another email once I have more information. Thanks, Aidan.
// Demis D. John 15:52, 6 August 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)