E-Beam Evaporation Recipes: Difference between revisions

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{{recipes|Vacuum Deposition}}
{{recipes|Vacuum Deposition}}
=[[E-Beam 1 (Sharon)]]=
=[[E-Beam 1 (Sharon)]]=
==Materials Table==
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible wikitable"
|-
! colspan=8 width=1100 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div>
|- bgcolor="#D0E7FF"
! width="75" bgcolor="#D0E7FF" align="center" | '''Material'''
! width="75" bgcolor="#D0E7FF" align="center" | '''Position'''
! width="75" bgcolor="#D0E7FF" align="center" | '''Hearth / Crucible'''
! width="85" bgcolor="#D0E7FF" align="center" | '''Film Number'''
! width="75" bgcolor="#D0E7FF" align="center" | '''Density'''
! width="75" bgcolor="#D0E7FF" align="center" | '''Z Ratio'''
! width="75" bgcolor="#D0E7FF" align="center" | '''Tooling'''
! width="500" bgcolor="#D0E7FF" align="center" | '''Comments'''
|-
| Ag
| 4
| C
| 5
| 10.5
| 0.524
| 140
| Brian, could you please check this table? Z ratio should be 0.529
|-
| Al
| 2
| C
| 6
| 2.7
| 1.080
| 118
|
|-
| Al<sub>2</sub>O<sub>3</sub>
| 1
| C
| 6
| 3.97
| 0.50
| 169
| Z-ratio should be 0.336
|-
| Au
| 4
| C
| 4
| 19.3
| 0.381
| 138
| Bazookas can be used at 20-30Å/sec.
|-
| AuGe
| 3
| C
| 5
| 17.63
| 0.397
| 151
| Composition unpredictable unless you practically empty the crucible.
|-
| Cr
| 3
| H
| 6
| 7.2
| 0.305
| 140
| Do not evaporate more than 200Å of Cr in the E-Beam evaporator.
|-
| Fe
|
|
|
| 7.86
| 0.349
|
|
|-
| Ge
| 3
| C
| 6
| 5.35
| 0.516
| 130
|
|-
| MgO
| 1
|
| 6
| 3.58
| 0.411
|
|
|-
| Mo
|
|
|
| 10.2
| 0.257
|
|
|-
| Ni
| 1
| H
| 1
| 8.91
| 0.331
| 140
| Prone to spitting. Cool down for 15 minutes before venting.
|-
| NiCr
| 1
| H
| 6
| 8.23
| 0.321
|
| Density 8.52, z ratio 0.3258
|-
| Nb
| 4
| C
| 6
| 8.57
| 0.516 ( should be 0.492)
|
| Cool down for at least 35 minutes before venting.
|-
| Pd
| 1
| H
| 9
| 12.0
| 0.357
| 140
|
|-
| Pt
| 1
| C
| 8
| 21.40
| 0.245
| 140
| Prone to spitting. Evaporate at 1.5Å/sec or less.
|-
| Si
| 2
| H
| 2
| 2.32
| 0.712
| 150
| Cool down very slowly after evaporating lest you crack the source.
|-
| SiO
|
| C
| 6
| 2.13
| 0.87
| 132
|
|-
| SiO<sub>2</sub>
| 1
| C
| 6
| 2.2 ( should be 2.648)
| 1.07 ( should be 1.000)
| 140
| Please change the crystal and the upper mirror after evaporating oxide.
|-
| SrF<sub>2</sub>
| 1
| C
| 6
| 4.28
| 0.727
| 140
|
|-
| Ta
| 1
| H
| 6
| 16.6
| 0.262
|
| Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call me before you try Ta.
|-
| W
| 1
| C
| 6
| 19.3
| 0.163
| 138
|
|-
| Ti
| 3
| H
| 3
| 4.50
| 0.628
| 139
|
|}

=[[E-Beam 2 (Custom)]]=
=[[E-Beam 2 (Custom)]]=
=[[E-Beam 3 (Temescal)]]=
=[[E-Beam 3 (Temescal)]]=

Revision as of 17:58, 7 September 2012

Back to Vacuum Deposition Recipes.

E-Beam 1 (Sharon)

Materials Table

Materials Table
Material Position Hearth / Crucible Film Number Density Z Ratio Tooling Comments
Ag 4 C 5 10.5 0.524 140 Brian, could you please check this table? Z ratio should be 0.529
Al 2 C 6 2.7 1.080 118
Al2O3 1 C 6 3.97 0.50 169 Z-ratio should be 0.336
Au 4 C 4 19.3 0.381 138 Bazookas can be used at 20-30Å/sec.
AuGe 3 C 5 17.63 0.397 151 Composition unpredictable unless you practically empty the crucible.
Cr 3 H 6 7.2 0.305 140 Do not evaporate more than 200Å of Cr in the E-Beam evaporator.
Fe 7.86 0.349
Ge 3 C 6 5.35 0.516 130
MgO 1 6 3.58 0.411
Mo 10.2 0.257
Ni 1 H 1 8.91 0.331 140 Prone to spitting. Cool down for 15 minutes before venting.
NiCr 1 H 6 8.23 0.321 Density 8.52, z ratio 0.3258
Nb 4 C 6 8.57 0.516 ( should be 0.492) Cool down for at least 35 minutes before venting.
Pd 1 H 9 12.0 0.357 140
Pt 1 C 8 21.40 0.245 140 Prone to spitting. Evaporate at 1.5Å/sec or less.
Si 2 H 2 2.32 0.712 150 Cool down very slowly after evaporating lest you crack the source.
SiO C 6 2.13 0.87 132
SiO2 1 C 6 2.2 ( should be 2.648) 1.07 ( should be 1.000) 140 Please change the crystal and the upper mirror after evaporating oxide.
SrF2 1 C 6 4.28 0.727 140
Ta 1 H 6 16.6 0.262 Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call me before you try Ta.
W 1 C 6 19.3 0.163 138
Ti 3 H 3 4.50 0.628 139

E-Beam 2 (Custom)

E-Beam 3 (Temescal)

E-Beam 4 (CHA)

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