E-Beam Evaporation Recipes: Difference between revisions

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=[[E-Beam 2 (Custom)]]=
=[[E-Beam 2 (Custom)]]=
==Materials Table (E-Beam #2)==
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable"
|-
! colspan=5 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div>
|- bgcolor="#D0E7FF"
! width="45" bgcolor="#D0E7FF" align="center" | '''Material'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Tooling factor, %'''
! width="100" bgcolor="#D0E7FF" align="center" | '''Comments'''
|-
|Al<sub>2</sub>O<sub>3</sub>
|3.97
|0.336
|140.0
|Tony could you please check this?
|-
|GeO<sub>2</sub>
|6.24
|1.000
|139.0
|
|-
|ITO
|7.16
|1.000
|139.0
|Density should be 6.43-7.14, z ratio?
|-
|MgO
|3.58
|0.411
|157.6
|OK
|-
|Si
|2.32
|0.712
|150.0
|
|-
|SiO<sub>2</sub>
|2.20
|1.070
|157.6
|Should be 2.648, z ratio 1.000
|-
|SiO<sub>x</sub>
|2.13
|0.87
|130.0
|
|-
|SrF<sub>2</sub>
|4.28
|0.727
|140.0
|
|-
|Ta<sub>2</sub>O<sub>5</sub>
|8.2
|0.30
|157.6
|
|-
|TiO<sub>2</sub>
|4.26
|0.400
|139.0
|
|-
|}

=[[E-Beam 3 (Temescal)]]=
=[[E-Beam 3 (Temescal)]]=
=[[E-Beam 4 (CHA)]]=
=[[E-Beam 4 (CHA)]]=

Revision as of 18:01, 7 September 2012

Back to Vacuum Deposition Recipes.

E-Beam 1 (Sharon)

Materials Table (E-Beam #1)

Materials Table
Material Position Hearth / Crucible Film Number Density Z Ratio Tooling Comments
Ag 4 C 5 10.5 0.524 140 Brian, could you please check this table? Z ratio should be 0.529
Al 2 C 6 2.7 1.080 118
Al2O3 1 C 6 3.97 0.50 169 Z-ratio should be 0.336
Au 4 C 4 19.3 0.381 138 Bazookas can be used at 20-30Å/sec.
AuGe 3 C 5 17.63 0.397 151 Composition unpredictable unless you practically empty the crucible.
Cr 3 H 6 7.2 0.305 140 Do not evaporate more than 200Å of Cr in the E-Beam evaporator.
Fe 7.86 0.349
Ge 3 C 6 5.35 0.516 130
MgO 1 6 3.58 0.411
Mo 10.2 0.257
Ni 1 H 1 8.91 0.331 140 Prone to spitting. Cool down for 15 minutes before venting.
NiCr 1 H 6 8.23 0.321 Density 8.52, z ratio 0.3258
Nb 4 C 6 8.57 0.516 ( should be 0.492) Cool down for at least 35 minutes before venting.
Pd 1 H 9 12.0 0.357 140
Pt 1 C 8 21.40 0.245 140 Prone to spitting. Evaporate at 1.5Å/sec or less.
Si 2 H 2 2.32 0.712 150 Cool down very slowly after evaporating lest you crack the source.
SiO C 6 2.13 0.87 132
SiO2 1 C 6 2.2 ( should be 2.648) 1.07 ( should be 1.000) 140 Please change the crystal and the upper mirror after evaporating oxide.
SrF2 1 C 6 4.28 0.727 140
Ta 1 H 6 16.6 0.262 Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call me before you try Ta.
W 1 C 6 19.3 0.163 138
Ti 3 H 3 4.50 0.628 139

E-Beam 2 (Custom)

Materials Table (E-Beam #2)

E-Beam 3 (Temescal)

E-Beam 4 (CHA)

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