E-Beam Evaporation Recipes: Difference between revisions

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=[[E-Beam 3 (Temescal)]]=
=[[E-Beam 3 (Temescal)]]=
==Materials Table (E-Beam #3)==
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible wikitable"
|-
! colspan=9 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div>
|- bgcolor="#D0E7FF"
! width="45" bgcolor="#D0E7FF" align="center" | '''Material'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Gun'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Hearth /Crucible'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Process Gain, A/sec/%pwr'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Film Number'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Tooling, %'''
! width="100" bgcolor="#D0E7FF" align="center" | '''Comments'''
|-
|Ag
| Rear
| C
| 10.0
| 2
|10.50
| 0.529
| 67
|
|-
| Al
| Rear
| C
| 10.0
| 1
|2.70
| 1.080
| 53
|
|-
| Au
| Front
| C
| 2.0
| 3
|19.30
| 0.381
| 56
|
|-
| Ge
| Rear
| C
| 10.0
| 3
|5.35
| 0.516
| 80
|
|-
| Ni
| Front
| C
| 0.5
| 2
|8.91
| 0.331
| 67
|
|-
| Pd
| Rear
| C
| 0.9
| 4
|12.038
| 0.357
| 48
|
|-
| Pt
| Front
| C
| 0.4
| 1
|21.40
| 0.245
| 67
|
|-
| Ti
| Front
| C
| 5.0
| 4
|4.50
| 0.628
| 67
|
|-
| Si
|
|
| 10.0
|
|2.32
| 0.712
| 100
|Not available
|-
|}
=[[E-Beam 4 (CHA)]]=
=[[E-Beam 4 (CHA)]]=
==Materials Table (E-Beam #4)==
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible wikitable"
|-
! colspan=6 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div>
|- bgcolor="#D0E7FF"
! width="45" bgcolor="#D0E7FF" align="center" | '''Material'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Master tooling, %'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Process Gain, A/sec/%pwr'''
! width="100" bgcolor="#D0E7FF" align="center" | '''Comments'''
|-
|Ag
| 10.50
| 0.529
|110
|10.0
|Tony, could you please check this?
|-
|Al
| 2.70
| 1.080
|165
|6.0
|
|-
|Au
|19.30
| 0.381
|120
|10.0
|
|-
|Co
|8.90
| 0.343
|150
|5.0
|
|-
|Cr
|7.20
| 0.305
|140
|10.0
|
|-
|Fe
|7.86
| 0.349
|165
|10.0
|
|-
|Ge
|5.35
| 0.516
|126
|10.0
|
|-
|Hf
|13.09
| 0.360
|150
|10.0
|
|-
|Ir
|22.40
| 0.129
|130
|10.0
|
|-
|Ni
|8.91
| 0.331
|150
|5.0
|
|-
|NiCr
|8.23
| 0.321
|140
|10.0
|density should be 8.50, z ratio 0.3258
|-
|NiFe
|8.70
|1.000
|100
|10.0
|
|-
|Pd
|12.038
|0.357
|112
|10.0
|
|-
|Pt
|21.40
|0.245
|130
|10.0
|
|-
|Ru
|12.362
|0.182
|100
|10.0
|
|-
|Ti
|4.50
|0.628
|183
|10.0
|
|-
|Zr
|6.49
|0.600
|150
|10.0
|
|-
|}

Revision as of 18:02, 7 September 2012

Back to Vacuum Deposition Recipes.

E-Beam 1 (Sharon)

Materials Table (E-Beam #1)

Materials Table
Material Position Hearth / Crucible Film Number Density Z Ratio Tooling Comments
Ag 4 C 5 10.5 0.524 140 Brian, could you please check this table? Z ratio should be 0.529
Al 2 C 6 2.7 1.080 118
Al2O3 1 C 6 3.97 0.50 169 Z-ratio should be 0.336
Au 4 C 4 19.3 0.381 138 Bazookas can be used at 20-30Å/sec.
AuGe 3 C 5 17.63 0.397 151 Composition unpredictable unless you practically empty the crucible.
Cr 3 H 6 7.2 0.305 140 Do not evaporate more than 200Å of Cr in the E-Beam evaporator.
Fe 7.86 0.349
Ge 3 C 6 5.35 0.516 130
MgO 1 6 3.58 0.411
Mo 10.2 0.257
Ni 1 H 1 8.91 0.331 140 Prone to spitting. Cool down for 15 minutes before venting.
NiCr 1 H 6 8.23 0.321 Density 8.52, z ratio 0.3258
Nb 4 C 6 8.57 0.516 ( should be 0.492) Cool down for at least 35 minutes before venting.
Pd 1 H 9 12.0 0.357 140
Pt 1 C 8 21.40 0.245 140 Prone to spitting. Evaporate at 1.5Å/sec or less.
Si 2 H 2 2.32 0.712 150 Cool down very slowly after evaporating lest you crack the source.
SiO C 6 2.13 0.87 132
SiO2 1 C 6 2.2 ( should be 2.648) 1.07 ( should be 1.000) 140 Please change the crystal and the upper mirror after evaporating oxide.
SrF2 1 C 6 4.28 0.727 140
Ta 1 H 6 16.6 0.262 Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call me before you try Ta.
W 1 C 6 19.3 0.163 138
Ti 3 H 3 4.50 0.628 139

E-Beam 2 (Custom)

Materials Table (E-Beam #2)

E-Beam 3 (Temescal)

Materials Table (E-Beam #3)

Materials Table
Material Gun Hearth /Crucible Process Gain, A/sec/%pwr Film Number Density, g/cm3 Z Ratio Tooling, % Comments
Ag Rear C 10.0 2 10.50 0.529 67
Al Rear C 10.0 1 2.70 1.080 53
Au Front C 2.0 3 19.30 0.381 56
Ge Rear C 10.0 3 5.35 0.516 80
Ni Front C 0.5 2 8.91 0.331 67
Pd Rear C 0.9 4 12.038 0.357 48
Pt Front C 0.4 1 21.40 0.245 67
Ti Front C 5.0 4 4.50 0.628 67
Si 10.0 2.32 0.712 100 Not available

E-Beam 4 (CHA)

Materials Table (E-Beam #4)

Materials Table
Material Density, g/cm3 Z Ratio Master tooling, % Process Gain, A/sec/%pwr Comments
Ag 10.50 0.529 110 10.0 Tony, could you please check this?
Al 2.70 1.080 165 6.0
Au 19.30 0.381 120 10.0
Co 8.90 0.343 150 5.0
Cr 7.20 0.305 140 10.0
Fe 7.86 0.349 165 10.0
Ge 5.35 0.516 126 10.0
Hf 13.09 0.360 150 10.0
Ir 22.40 0.129 130 10.0
Ni 8.91 0.331 150 5.0
NiCr 8.23 0.321 140 10.0 density should be 8.50, z ratio 0.3258
NiFe 8.70 1.000 100 10.0
Pd 12.038 0.357 112 10.0
Pt 21.40 0.245 130 10.0
Ru 12.362 0.182 100 10.0
Ti 4.50 0.628 183 10.0
Zr 6.49 0.600 150 10.0
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