Lithography Recipes: Difference between revisions

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==Lift-Off Techniques==
== Lift-Off Techniques ==

*{{fl|Liftoff-Techniques.pdf|Description/Tutorial}}
*{{fl|Liftoff-Techniques.pdf|Description/Tutorial}}
*{{fl|Bi-LayerContactprocesswithPMGI.pdf|Bi-Layer Process with PMGI Underlayer and Contact Aligner}}
*{{fl|Bi-LayerContactprocesswithPMGI.pdf|Bi-Layer Process with PMGI Underlayer and Contact Aligner}}


==Chemical Datasheets==
== Chemical Datasheets ==

{|
{|
|-valign="top"
|- valign="top"
|width=400|
| width="400" |
;Positive Photoresists
;Positive Photoresists

*{{fl|AXP4000pb-Datasheet.pdf|AZP4000 (AZ4110, AZ4210, AZ4330)}}
*{{fl|OCG825-Positive-Resist-Datasheet.pdf|OCG825}}
*{{fl|AXP4000pb-Datasheet.pdf|AZP4000 (AZ4110, AZ4210, AZ4330)}}
*{{fl|SPR220-Positive-Resist-Datasheet.pdf|SPR220 (SPR220-3, SPR220-7)}}
*{{fl|OCG825-Positive-Resist-Datasheet.pdf|OCG825}}
*{{fl|SPR950-Positive-Resist-Datasheet.pdf|SPR950-0.8}}
*{{fl|SPR220-Positive-Resist-Datasheet.pdf|SPR220 (SPR220-3, SPR220-7)}}
*{{fl|SPR955-Positive-Resist-Datasheet.pdf|SPR955CM (SPR955CM-0.9, SPR955CM-1.8)}}
*{{fl|SPR950-Positive-Resist-Datasheet.pdf|SPR950-0.8}}
*{{fl|SPR955-Positive-Resist-Datasheet.pdf|SPR955CM (SPR955CM-0.9, SPR955CM-1.8)}}
⚫
*{{fl|UV6-Positive-Resist-Datasheet.pdf|UV6-0.7}}

;Negative Photoresists
;Negative Photoresists

⚫
*{{fl|AZ5214-Negative-Resist-Datasheet.pdf|AZ5214}}
*{{fl|AZnLOF5510-Negative-Resist-Datasheet.pdf|AZnLOF5510}}
*{{fl|AZ5214-Negative-Resist-Datasheet.pdf|AZ5214}}
*{{fl|AZnLOF5510-Negative-Resist-Datasheet.pdf|AZnLOF5510}}
*{{fl|AZnLOF2020-Negative-Resist-Datasheet.pdf|AZnLOF2000 (AZnLOF2020, AZnLOF2035, AZnLOF2070)}}
*{{fl|AZnLOF2020-Negative-Resist-Datasheet.pdf|AZnLOF2000 (AZnLOF2020, AZnLOF2035, AZnLOF2070)}}

;Underlayers
;Underlayers

*{{fl|PMGI-Underlayer-Datasheet.pdf|PMGI (PMGI SF-11, PMGI SF-13, PMGI SF-15)}}
*{{fl|PMGI-Underlayer-Datasheet.pdf|PMGI (PMGI SF-11, PMGI SF-13, PMGI SF-15)}}
*{{fl|LOL2000-Underlayer-Datasheet.pdf|Shipley LOL2000}}
*{{fl|LOL2000-Underlayer-Datasheet.pdf|Shipley LOL2000}}

;E-beam resists
;E-beam resists

*{{fl|PMMA-E-Beam-Resist-Datasheet.pdf|PMMA (PMMA, P(MMA-MAA) copolymer)}}
*{{fl|PMMA-E-Beam-Resist-Datasheet.pdf|PMMA (PMMA, P(MMA-MAA) copolymer)}}
*{{fl|maN2403-E-Beam-Resist-Datasheet.pdf|maN 2403}}
*{{fl|maN2403-E-Beam-Resist-Datasheet.pdf|maN 2403}}

|
|
;Nanoimprinting
;Nanoimprinting

*{{fl|NX1020-Nanoimprinting-Datasheet.pdf|NX1020}}
*{{fl|NX1020-Nanoimprinting-Datasheet.pdf|NX1020}}
*{{fl|MRI-7020-Nanoimprinting-Datasheet.pdf|MRI-7020}}
*{{fl|MRI-7020-Nanoimprinting-Datasheet.pdf|MRI-7020}}

;Contrast Enhancement Materials
;Contrast Enhancement Materials

*{{fl|CEM365iS-Contrast-Enhancement-Datasheet.pdf|CEM365iS}}
*{{fl|CEM365iS-Contrast-Enhancement-Datasheet.pdf|CEM365iS}}

;Anti-Reflection Coatings
;Anti-Reflection Coatings

*{{fl|XHRiC-Anti-Reflective-Coating.pdf|XHRiC}}
*{{fl|XHRiC-Anti-Reflective-Coating.pdf|XHRiC}}

;Developers
;Developers

*{{fl|AZ400K-Developer-Datasheet.pdf|AZ400K (AZ400K, AZ400K1:4)}}
*{{fl|AZ400K-Developer-Datasheet.pdf|AZ400K (AZ400K, AZ400K1:4)}}
*{{fl|AZ300MIF-Developer-Datasheet.pdf|AZ300MIF}}
*{{fl|AZ300MIF-Developer-Datasheet.pdf|AZ300MIF}}

;Photoresist Removers
;Photoresist Removers

⚫
*{{fl|1165-Resist-Remover.pdf|1165}}
*{{fl|AZ300T-Resist-Remover.pdf|AZ300T}}
*{{fl|1165-Resist-Remover.pdf|1165}}
⚫
*{{fl|AZ300T-Resist-Remover.pdf|AZ300T}}
*{{fl|PRX-127-Resist-Remover.pdf|PRX-127}}
*{{fl|PRX-127-Resist-Remover.pdf|PRX-127}}

|}
|}


==Recipes==
== Recipes ==

{{Recipe Table Explanation}}
{{Recipe Table Explanation}}

{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" class="wikitable"
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" class="wikitable"
|- bgcolor="#D0E7FF"
|- bgcolor="#D0E7FF"
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! width="150" bgcolor="#D0E7FF" align="center" | '''Positive Resists'''
! width="150" bgcolor="#D0E7FF" align="center" | '''Positive Resists'''
{{LithRecipe Table}}
{{LithRecipe Table}}

|-
|-
| bgcolor="#D0E7FF" align="center" | AZ4110
| bgcolor="#D0E7FF" align="center" | AZ4110
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
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| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
|-
| bgcolor="#D0E7FF" align="center" | AZ4210
| bgcolor="#D0E7FF" align="center" | AZ4210
| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
| {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
| {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
| <br>
| <br>
| <br>
| <br>
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| <br>
| <br>
|-
|-
| bgcolor="#D0E7FF" align="center" | AZ4330RS
| bgcolor="#D0E7FF" align="center" | AZ4330RS
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
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| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
|-
| bgcolor="#D0E7FF" align="center" | OCG 825-35CS
| bgcolor="#D0E7FF" align="center" | OCG 825-35CS
| <br>
| <br>
| <br>
| <br>
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| <br>
| <br>
|-
|-
| bgcolor="#D0E7FF" align="center" | SPR 950-0.8
| bgcolor="#D0E7FF" align="center" | SPR 950-0.8
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
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| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
|-
| bgcolor="#D0E7FF" align="center" | SPR 955 CM-0.9
| bgcolor="#D0E7FF" align="center" | SPR 955 CM-0.9
| <br>
| <br>
| <br>
| <br>
| {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
| {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
| {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
| {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
| <br>
| <br>
| <br>
| <br>
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| <br>
| <br>
|-
|-
| bgcolor="#D0E7FF" align="center" | SPR 955 CM-1.8
| bgcolor="#D0E7FF" align="center" | SPR 955 CM-1.8
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
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| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
|-
| bgcolor="#D0E7FF" align="center" | SPR 220-3.0
| bgcolor="#D0E7FF" align="center" | SPR 220-3.0
| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
| {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
| {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
| {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
| {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
| {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
| {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
| <br>
| <br>
| <br>
| <br>
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| <br>
| <br>
|-
|-
| bgcolor="#D0E7FF" align="center" | SPR 220-7.0
| bgcolor="#D0E7FF" align="center" | SPR 220-7.0
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
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| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
|-
| bgcolor="#D0E7FF" align="center" | THMR-IP3600 HP D
| bgcolor="#D0E7FF" align="center" | THMR-IP3600 HP D
| <br>
| <br>
| <br>
| <br>
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| <br>
| <br>
|-
|-
| bgcolor="#D0E7FF" align="center" |UV6-0.7
| bgcolor="#D0E7FF" align="center" | UV6-0.7
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
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! bgcolor="#D0E7FF" align="center" | '''Negative Resists'''
! bgcolor="#D0E7FF" align="center" | '''Negative Resists'''
{{LithRecipe Table}}
{{LithRecipe Table}}

|-bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | AZ5214-EIR
|- bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | AZ5214-EIR
⚫
| {{rl|Contact_Alignment_Recipes|Negative Resist (MJB-3)}}
| {{rl|Contact_Alignment_Recipes|Negative Resist (MA-6)}}
| {{rl|Contact_Alignment_Recipes|Negative Resist (MJB-3)}}
| {{rl|Stepper Recipes|Negative Resist (GCA 6300)}}
| {{rl|Contact_Alignment_Recipes|Negative Resist (MA-6)}}
| {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
| {{rl|Stepper Recipes|Negative Resist (GCA 6300)}}
⚫
| {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
|
|
|
|
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|
|
|-
|-
| bgcolor="#D0E7FF" align="center" | AZnLOF 2020
| bgcolor="#D0E7FF" align="center" | AZnLOF 2020
| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
| {{rl|Contact_Alignment_Recipes|Negative Resist (MA-6)}}
| {{rl|Contact_Alignment_Recipes|Negative Resist (MA-6)}}
| {{rl|Stepper Recipes|Negative Resist (GCA 6300)}}
| {{rl|Stepper Recipes|Negative Resist (GCA 6300)}}
| {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
| {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
|
|
|
|
|
|
|
|
|-bgcolor="EEFFFF"
|- bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | AZnLOF 2035
| bgcolor="#D0E7FF" align="center" | AZnLOF 2035
|
|
|
|
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|
|
|-
|-
| bgcolor="#D0E7FF" align="center" | AZnLOF 2070
| bgcolor="#D0E7FF" align="center" | AZnLOF 2070
|
|
|
|
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|
|
|
|
|-bgcolor="EEFFFF"
|- bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | AZnLOF P5510
| bgcolor="#D0E7FF" align="center" | AZnLOF P5510
|
|
|
|
| {{rl|Stepper Recipes|Negative Resist (GCA 6300)}}
| {{rl|Stepper Recipes|Negative Resist (GCA 6300)}}
| {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
| {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
|
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|
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|-
|-
| bgcolor="#D0E7FF" align="center" | UVN30-0.5
| bgcolor="#D0E7FF" align="center" | UVN30-0.5
|
|
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|
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|
|
|-bgcolor="EEFFFF"
|- bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | SU-8 2015
| bgcolor="#D0E7FF" align="center" | SU-8 2015
|
|
|
|
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! bgcolor="#D0E7FF" align="center" | '''Underlayers'''
! bgcolor="#D0E7FF" align="center" | '''Underlayers'''
{{LithRecipe Table}}
{{LithRecipe Table}}

|-bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | PMGI SF-11
|- bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | PMGI SF-11
| <br>
| <br>
| <br>
| <br>
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| <br>
| <br>
|-
|-
| bgcolor="#D0E7FF" align="center" | PMGI SF-15
| bgcolor="#D0E7FF" align="center" | PMGI SF-15
|
|
|
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|
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|
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⚫
|
|
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|
|
⚫
|
|-bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | LOL 2000
|- bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | LOL 2000
|
|
|
|
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|
|
|-
|-
| bgcolor="#D0E7FF" align="center" | XHRIC-11 (BARC)
| bgcolor="#D0E7FF" align="center" | XHRIC-11 (BARC)
|
|
|
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|
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|
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|-bgcolor="EEFFFF"
|- bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | AR-2 (BARC)
| bgcolor="#D0E7FF" align="center" | AR-2 (BARC)
|
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|
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|-
|-
| bgcolor="#D0E7FF" align="center" | DS-K 101-307 (BARC)
| bgcolor="#D0E7FF" align="center" | DS-K 101-307 (BARC)
|
|
|
|
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! bgcolor="#D0E7FF" align="center" | '''Overlayers'''
! bgcolor="#D0E7FF" align="center" | '''Overlayers'''
{{LithRecipe Table}}
{{LithRecipe Table}}

|-bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | CEM-365 IS
|- bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | CEM-365 IS
|
|
|
|
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! bgcolor="#D0E7FF" align="center" | '''E-Beam Resists'''
! bgcolor="#D0E7FF" align="center" | '''E-Beam Resists'''
{{LithRecipe Table}}
{{LithRecipe Table}}

|- bgcolor="EEFFFF"
|- bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | ??????
| bgcolor="#D0E7FF" align="center" | &nbsp;??????
⚫
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⚫
|
|-
|-
| bgcolor="#D0E7FF" align="center" | ???????
| bgcolor="#D0E7FF" align="center" | &nbsp;???????
|
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! bgcolor="#D0E7FF" align="center" | '''Nanoimprint Resists'''
! bgcolor="#D0E7FF" align="center" | '''Nanoimprint Resists'''
{{LithRecipe Table}}
{{LithRecipe Table}}

|- bgcolor="EEFFFF"
|- bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | MR-I 7020
| bgcolor="#D0E7FF" align="center" | MR-I 7020
⚫
|
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⚫
|
|-
|-
| bgcolor="#D0E7FF" align="center" | Nanonex NX-1020
| bgcolor="#D0E7FF" align="center" | Nanonex NX-1020
|
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|-
|-
! bgcolor="#D0E7FF" align="center" |
! bgcolor="#D0E7FF" align="center" |
{{LithRecipe Table}}
{{LithRecipe Table}}

|}
|}

Revision as of 20:58, 22 April 2013

Lift-Off Techniques

Chemical Datasheets

Positive Photoresists
Negative Photoresists
Underlayers
E-beam resists
Nanoimprinting
Contrast Enhancement Materials
Anti-Reflection Coatings
Developers
Photoresist Removers

Recipes

  • R = Recipe is available. Clicking this link will take you to the recipe.
  • A = Material is available for use, but no recipes are provided.


Lithography Recipes

 Contact Aligners Steppers Flood Expose E-Beam Lithography
Positive Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		MLA150
(Heidelberg)


AZ4110 R1 R1
AZ4210 R1 R1





AZ4330RS R1 R1
OCG 825-35CS







SPR 950-0.8
SPR 955 CM-0.9

R1 R1



SPR 955 CM-1.8 R1 R1
SPR 220-3.0 R1 R1 R1 R1



SPR 220-7.0 R1 R1 R1 R1
THMR-IP3600 HP D







UV6-0.7
Negative Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		MLA150
(Heidelberg)


AZ5214-EIR R1 R1 R1 R1
AZnLOF 2020 R1 R1 R1 R1
AZnLOF 2035
AZnLOF 2070
AZnLOF P5510 R1 R1
UVN30-0.5
SU-8 2015
Underlayers SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		MLA150
(Heidelberg)


PMGI SF-11







PMGI SF-15
LOL 2000
XHRIC-11 (BARC)
AR-2 (BARC)
DS-K 101-307 (BARC)
Overlayers SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		MLA150
(Heidelberg)


CEM-365 IS
E-Beam Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		MLA150
(Heidelberg)


 ??????
 ???????
Nanoimprint Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		MLA150
(Heidelberg)


MR-I 7020
Nanonex NX-1020
SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		MLA150
(Heidelberg)


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