ICP Etching Recipes: Difference between revisions
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=[[ICP Etch 2 (Panasonic E640)]]= |
=[[ICP Etch 2 (Panasonic E640)]]= |
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== |
==SiO<sub>2</sub> Etching (Panasonic 2)== |
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*[[media:Panasonic2-SiOx-Recipe.pdf| |
*[[media:Panasonic2-SiOx-Recipe.pdf|SiO<sub>2</sub> Vertical Etch Recipe]] |
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=[[ICP-Etch (Unaxis VLR)]]= |
=[[ICP-Etch (Unaxis VLR)]]= |
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Revision as of 18:49, 30 August 2013
Back to Dry Etching Recipes.