RIE Etching Recipes: Difference between revisions
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=[[RIE 5 (PlasmaTherm)]] = |
=[[RIE 5 (PlasmaTherm)]] = |
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==AlGaAs Etching (RIE 5)== |
==AlGaAs Etching (RIE 5)== |
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*[[media:|AlGaAs Etch Recipes]] |
*[[media:13-GaAs-AlGaAs_Etching-RIE-5.pdf|AlGaAs Etch Recipes]] |
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==GaN Etching (RIE 5)== |
==GaN Etching (RIE 5)== |
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*[[media:08-Plasma_Etching_of_GaN-RIE5.pdf|GaN Etch Recipes]] |
*[[media:08-Plasma_Etching_of_GaN-RIE5.pdf|GaN Etch Recipes]] |
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Revision as of 18:27, 2 October 2013
Back to Dry Etching Recipes.